Problem metalica 2001-04-12 13:47:08: gate valve

jhaydon at jhaydon at
Mon Apr 16 08:56:36 PDT 2001

gate valve was opened to far and had jamed. In the future try not to open or close this valve to far. There was also some broken wafer in the chamber which may have cased the cryopump to dump by not allowing the valve to close completly.

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