Problem metalica 2001-12-05 13:40:34: Cryopump needs Regen.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Wed Dec 5 01:40:35 PST 2001


Temperture 18 degress when I started pumping down the system. After two hours it wouldn't pumpdown to a base pressure    to operate per specification.




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