From mcvittie at snf.stanford.edu Sat May 3 04:14:36 2003 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: May 3, 2003 4:14:36 PM Subject: Problem metalica 2003-05-03 16:14:36: Report Problem for metalica Message-ID: The power connector to the "b" gun is loose and should be taken apart and remade. For now it should still be usable for DCsputtering but I would like to see it fixed within the next week. The way that I found it is bad is by doing RF impedance measurements looking into the cable from the other end. Jim McVittie From mcvittie at snf.stanford.edu Sat May 3 04:23:55 2003 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: May 3, 2003 4:23:55 PM Subject: Comment metalica 2003-05-03 16:23:54: Report Comment for metalica Message-ID: Metalica User, I have replaced the normal cooling water system with a homebuilt one that can supply the guns with MegOhm-cm resistivity water. The reason for this change is that I am trying to get the guns to work in the RF mode for sputtering dielectics. For now please do not run the guns longer than the normal 10 min sputter time. We can probably go longer once we better understand the cooling cabability this cooling system. Jim McVittie From qwang at snf.stanford.edu Tue May 6 05:33:06 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: May 6, 2003 5:33:06 PM Subject: Shutdown metalica 2003-05-06 17:33:05: Cyro pump need to be regenerated Message-ID: From booth at snf.stanford.edu Wed May 7 06:42:53 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 7, 2003 6:42:53 AM Subject: Shutdown metalica 2003-05-06 17:33:05: Report Clear for metalica Message-ID: As requested by Elahea I am clearing the Shutdown for cryo regen. From jhaydon at snf.stanford.edu Wed May 7 08:05:58 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 7, 2003 8:05:58 AM Subject: Problem metalica 2003-05-03 16:14:36: Report Clear for metalica Message-ID: since RF is not used currently and the cable works for dc than this is not really an problem From jhaydon at snf.stanford.edu Mon May 12 04:01:21 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 12, 2003 4:01:21 PM Subject: Problem metalica 2003-05-12 16:01:20: Report Problem for metalica Message-ID: down for regen should be up tomorrow morning From cbaxter at snf.stanford.edu Mon May 12 10:49:44 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 12, 2003 10:49:44 PM Subject: Problem metalica 2003-05-12 16:01:20: Report Clear for metalica Message-ID: Cryo regen completed From mislam at snf.stanford.edu Mon May 19 08:41:54 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: May 19, 2003 8:41:54 AM Subject: Shutdown metalica 2003-05-19 08:41:51: Cryo needs regen. Message-ID: Found Cryo temp. at 19K. From jhaydon at snf.stanford.edu Mon May 19 04:30:29 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 19, 2003 4:30:29 PM Subject: Shutdown metalica 2003-05-19 08:41:51: Report Clear for metalica Message-ID: regen complete ok to use From qwang at snf.stanford.edu Fri May 23 08:08:49 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: May 23, 2003 8:08:49 AM Subject: Shutdown metalica 2003-05-23 08:08:48: high temperature of cyro pump Message-ID: From booth at snf.stanford.edu Sat May 24 08:58:34 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 24, 2003 8:58:34 AM Subject: Shutdown metalica 2003-05-23 08:08:48: Report Clear for metalica Message-ID: clearing this regen shutdown so the machine can be used during the weekend. From mcconnel at snf.stanford.edu Tue May 27 03:33:47 2003 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: May 27, 2003 3:33:47 AM Subject: Problem metalica 2003-05-27 03:33:47: Report Problem for metalica Message-ID: After pumping down for over three hours, I could only reach a base pressure of around 3.92e-6. During a previous run earlier in the evening, it required only 1 hour 45 minutes to reach well below base pressure. From jhaydon at snf.stanford.edu Tue May 27 09:29:12 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 27, 2003 9:29:12 AM Subject: Problem metalica 2003-05-27 03:33:47: Report Clear for metalica Message-ID: probably the n2 chamber vent valve was not closed all the way or the wafer may not have been dry or a baad seal. It is pumping down very well at this time. From qwang at snf.stanford.edu Wed May 28 10:59:27 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: May 28, 2003 10:59:27 AM Subject: Shutdown metalica 2003-05-28 10:59:26: Pump need to be regenerated Message-ID: From jhaydon at snf.stanford.edu Wed May 28 03:15:30 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 28, 2003 3:15:30 PM Subject: Shutdown metalica 2003-05-28 10:59:26: Report Clear for metalica Message-ID: ok to use when regen complete From jhaydon at snf.stanford.edu Wed May 28 03:16:15 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 28, 2003 3:16:15 PM Subject: Problem metalica 2003-05-28 15:16:14: Report Problem for metalica Message-ID: ok to use when regen complete From qwang at snf.stanford.edu Thu May 29 07:38:48 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: May 29, 2003 7:38:48 AM Subject: Shutdown metalica 2003-05-29 07:38:46: Dummy wafer is broken in the chamber Message-ID: The broken chip on the gate to the cyro pump result huge leakage and temperature is up to 50K again. From jhaydon at snf.stanford.edu Thu May 29 07:58:08 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 29, 2003 7:58:08 AM Subject: Problem metalica 2003-05-28 15:16:14: Report Clear for metalica Message-ID: regen complete From jhaydon at snf.stanford.edu Thu May 29 04:31:07 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 29, 2003 4:31:07 PM Subject: Shutdown metalica 2003-05-29 07:38:46: Report Clear for metalica Message-ID: fix complete ok to use when cryo has reached operating temp From jhaydon at snf.stanford.edu Thu May 29 04:34:06 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 29, 2003 4:34:06 PM Subject: Problem metalica 2003-05-29 16:34:06: Report Problem for metalica Message-ID: being regend ok to use when temperature has been reached From cbaxter at snf.stanford.edu Thu May 29 09:38:49 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 29, 2003 9:38:49 PM Subject: Problem metalica 2003-05-29 16:34:06: Report Clear for metalica Message-ID: cryo regen completed From maurice at snf.stanford.edu Fri May 30 10:42:54 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 30, 2003 10:42:54 AM Subject: Shutdown metalica 2003-05-30 10:42:53: Report Shutdown for metalica Message-ID: cryo dumped. possible leaky seal. needs regen