Problem metalica 2003-05-27 03:33:47: Report Clear for metalica

jhaydon at snf.stanford.edu jhaydon at snf.stanford.edu
Tue May 27 09:29:12 PDT 2003


probably the n2 chamber vent valve was not closed all the way or the wafer may not have been dry or a baad seal. It is pumping down very well at this time.




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