From amyers at snf.stanford.edu Wed Dec 1 13:48:26 2004 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Wed, 1 Dec 2004 13:48:26 -0800 Subject: Problem metalica SNF 2004-12-01 13:48:26: target a plasma issue Message-ID: Target a continues to lose plasma at higher powers. At the start of my depositions I could not strike plasma above 96 W. I lowered the power to 70 W. I had 3 wafers with 3 10 minute depositions/wafer. By my last run of my last wafer, I had to lower the power to 66 W to maintain plasma. From wingcat at snf.stanford.edu Sun Dec 5 14:24:41 2004 From: wingcat at snf.stanford.edu (wingcat at snf.stanford.edu) Date: Sun, 5 Dec 2004 14:24:41 -0800 Subject: Comment metalica SNF 2004-12-05 14:24:40: target A plasma ok? Message-ID: Just did a plasma to 96W on target A with no problems. From jperez at snf.stanford.edu Tue Dec 7 15:13:47 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Dec 2004 15:13:47 -0800 Subject: Comment metalica SNF 2004-12-05 14:24:40: target A plasma ok? Message-ID: Good news From jperez at snf.stanford.edu Tue Dec 7 15:16:32 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Dec 2004 15:16:32 -0800 Subject: Problem metalica SNF 2004-12-01 13:48:26: target a plasma issue Message-ID: Source gun (target A) ran fine today with new Ti and W target today. From jperez at snf.stanford.edu Tue Dec 7 15:23:21 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Dec 2004 15:23:21 -0800 Subject: Problem metalica SNF 2004-12-07 15:23:21: Smelling an odor when bell jar is lifted Message-ID: Two separate users today after deposition when lifting the bell jar up a strong odor, but no one could recognize the smell. From emyers at snf.stanford.edu Wed Dec 8 14:01:22 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 8 Dec 2004 14:01:22 -0800 Subject: Comment metalica SNF 2004-12-08 14:01:21: Odor Message-ID: Smell is similar to rotten eggs. Previous user deposited sulfur based alloy. this could be cause of the smell. System coould be sulfur contaminated. From rcrane at snf.stanford.edu Wed Dec 8 15:23:29 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 08 Dec 2004 15:23:29 -0800 Subject: Comment metalica SNF 2004-12-08 14:01:21: Odor Message-ID: <41B78CF1.1D09F91C@snf.stanford.edu> Ed, Was the chimney changed after the ZnS dep, or was it perhaps left in and is heating/outgassing from the next dep? I believe a chimney is dedicated to ZnS work. Dick From jperez at snf.stanford.edu Thu Dec 9 15:57:46 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 9 Dec 2004 15:57:46 -0800 Subject: Shutdown metalica SNF 2004-12-09 15:57:45: A pungent odor when bell jar is lifted Message-ID: Down for clean. From jperez at snf.stanford.edu Fri Dec 10 16:00:31 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 10 Dec 2004 16:00:31 -0800 Subject: Problem metalica SNF 2004-12-07 15:23:21: Smelling an odor when bell jar is lifted Message-ID: System down for chamber clean and cryo pump regen From jperez at snf.stanford.edu Fri Dec 10 16:02:28 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 10 Dec 2004 16:02:28 -0800 Subject: Comment metalica SNF 2004-12-08 14:01:21: Odor Message-ID: Chamber cleaned, but still had an odor. Regen Cryo pump From jperez at snf.stanford.edu Fri Dec 10 16:04:49 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 10 Dec 2004 16:04:49 -0800 Subject: Shutdown metalica SNF 2004-12-09 15:57:45: A pungent odor when bell jar is lifted Message-ID: After Chamber and parts clean, regen Cryo pump and when bell jar was lifted after pumping chamber for a few hours NO odor.