Problem metalica SNF 2004-12-01 13:48:26: target a plasma issue

amyers at snf.stanford.edu amyers at snf.stanford.edu
Wed Dec 1 13:48:26 PST 2004


Target a continues to lose plasma at higher powers.  At the start of my depositions I could not strike plasma above 96 W.  I lowered the power to 70 W.  I had 3 wafers with 3 10 minute depositions/wafer.  By my last run of my last wafer, I had to lower the power to 66 W to maintain plasma.  




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