From jhaydon at snf.stanford.edu Mon Feb 2 09:31:05 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Feb 2004 09:31:05 -0800 Subject: Problem metalica 2004-01-30 17:46:26: cryopump is too hot Message-ID: cryo regened ok to use From gu at snf.stanford.edu Tue Feb 3 17:38:34 2004 From: gu at snf.stanford.edu (gu at snf.stanford.edu) Date: Tue, 3 Feb 2004 17:38:34 -0800 Subject: Problem metalica 2004-02-03 17:38:33: valve for roughing pump does not work Message-ID: From gu at snf.stanford.edu Tue Feb 3 18:25:43 2004 From: gu at snf.stanford.edu (gu at snf.stanford.edu) Date: Tue, 3 Feb 2004 18:25:43 -0800 Subject: Shutdown metalica 2004-02-03 18:25:42: valve for roughing pump does not work Message-ID: From cbaxter at snf.stanford.edu Tue Feb 3 23:04:46 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Feb 2004 23:04:46 -0800 Subject: Shutdown metalica 2004-02-03 18:25:42: valve for roughing pump does not work Message-ID: rebuild roughing valve From cbaxter at snf.stanford.edu Tue Feb 3 23:04:57 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Feb 2004 23:04:57 -0800 Subject: Problem metalica 2004-02-03 17:38:33: valve for roughing pump does not work Message-ID: From gu at snf.stanford.edu Wed Feb 4 19:39:36 2004 From: gu at snf.stanford.edu (gu at snf.stanford.edu) Date: Wed, 4 Feb 2004 19:39:36 -0800 Subject: Problem metalica 2004-02-04 19:39:35: temperature of cryopump is > 20 K Message-ID: From jhaydon at snf.stanford.edu Thu Feb 5 16:23:49 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 5 Feb 2004 16:23:49 -0800 Subject: Problem metalica 2004-02-05 16:23:48: down for regen Message-ID: From zia at snf.stanford.edu Sun Feb 8 12:34:17 2004 From: zia at snf.stanford.edu (zia at snf.stanford.edu) Date: Sun, 8 Feb 2004 12:34:17 -0800 Subject: Comment metalica 2004-02-08 12:34:16: Cyropump needs regen Message-ID: Hello, The cryopump temperature now is at just under 20K and probably needs to be regened. Thanks, Rashid. From jhaydon at snf.stanford.edu Mon Feb 9 09:33:15 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 Feb 2004 09:33:15 -0800 Subject: Problem metalica 2004-02-05 16:23:48: down for regen Message-ID: regen completed ok to use From jhaydon at snf.stanford.edu Mon Feb 9 09:33:54 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 Feb 2004 09:33:54 -0800 Subject: Problem metalica 2004-02-04 19:39:35: temperature of cryopump is > 20 K Message-ID: regen started From jhaydon at snf.stanford.edu Mon Feb 9 09:34:36 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 Feb 2004 09:34:36 -0800 Subject: Shutdown metalica 2004-02-09 09:34:35: regen again Message-ID: From jperez at snf.stanford.edu Mon Feb 9 15:27:41 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Feb 2004 15:27:41 -0800 Subject: Shutdown metalica 2004-02-09 09:34:35: regen again Message-ID: Regen will be completed around 5:30 PM. See Eric P. From jhaydon at snf.stanford.edu Mon Feb 9 15:53:20 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 Feb 2004 15:53:20 -0800 Subject: Problem metalica 2004-01-26 16:11:07: Report Problem for metalica Message-ID: From parco at snf.stanford.edu Wed Feb 11 02:19:04 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Wed, 11 Feb 2004 02:19:04 -0800 Subject: Comment metalica 2004-02-11 02:19:03: No Comments Why Metallica Is Down Message-ID: Whoever was the last previous user(s), did not made a comment why metallica is down. It would be nice to know the current situation and/or status of the equipment. A small comment would suffice to help the maintenace correct the problem immediately. From sjim at snf.stanford.edu Thu Feb 12 08:11:13 2004 From: sjim at snf.stanford.edu (sjim at snf.stanford.edu) Date: Thu, 12 Feb 2004 08:11:13 -0800 Subject: Problem metalica 2004-02-12 08:11:12: cryo temp >18K Message-ID: From chungchu at snf.stanford.edu Thu Feb 12 14:21:19 2004 From: chungchu at snf.stanford.edu (chungchu at snf.stanford.edu) Date: Thu, 12 Feb 2004 14:21:19 -0800 Subject: Problem metalica 2004-02-12 14:21:17: Water in the rough pump tank Message-ID: It seems somebody added some water. From parco at snf.stanford.edu Thu Feb 12 23:02:22 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Thu, 12 Feb 2004 23:02:22 -0800 Subject: Problem metalica 2004-02-12 23:02:22: Cryo is above 18K Message-ID: processed one set of wafers (x3+1dummy), cryo temp. started at 18K and ended 22K after a total sputtered time of 00:08:24. No sudden changes in pressure, flow, power, and no arcing. needs to regenerate cryo From jhaydon at snf.stanford.edu Tue Feb 17 09:45:36 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:45:36 -0800 Subject: Problem metalica 2004-02-12 23:02:22: Cryo is above 18K Message-ID: regen was done over the week end ok to use From jhaydon at snf.stanford.edu Tue Feb 17 09:47:25 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:47:25 -0800 Subject: Problem metalica 2004-02-12 14:21:17: Water in the rough pump tank Message-ID: water in the cold trap is probably just condensation From jhaydon at snf.stanford.edu Tue Feb 17 09:47:44 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:47:44 -0800 Subject: Problem metalica 2004-02-12 08:11:12: cryo temp >18K Message-ID: regen completed ok to use From jhaydon at snf.stanford.edu Tue Feb 17 09:48:34 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:48:34 -0800 Subject: Problem metalica 2004-01-23 14:23:16: Pressure rose and had to abort process Message-ID: have not had reccurence of this problem could not find a cause From coolchip at snf.stanford.edu Wed Feb 18 18:26:11 2004 From: coolchip at snf.stanford.edu (coolchip at snf.stanford.edu) Date: Wed, 18 Feb 2004 18:26:11 -0800 Subject: Comment metalica 2004-02-18 18:26:10: pump temperature is about 20K Message-ID: From parco at snf.stanford.edu Thu Feb 19 08:43:59 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Thu, 19 Feb 2004 08:43:59 -0800 Subject: Problem metalica 2004-02-19 08:43:58: cryo temp high ~26K Message-ID: cryo temp high ~26K, needs to be regenerated. Thanks From jhaydon at snf.stanford.edu Fri Feb 20 07:03:24 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 20 Feb 2004 07:03:24 -0800 Subject: Problem metalica 2004-02-19 08:43:58: cryo temp high ~26K Message-ID: regen completed ok to use From mislam at snf.stanford.edu Sat Feb 21 09:12:10 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 21 Feb 2004 09:12:10 -0800 Subject: Problem metalica 2004-02-21 09:12:10: Cryo temp 19k Message-ID: Will need regen soon, may be good for one more run. From parco at snf.stanford.edu Mon Feb 23 09:43:05 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:43:05 -0800 Subject: Problem metalica 2004-02-23 09:43:04: cryo needs regen, temp >20K Message-ID: From jhaydon at snf.stanford.edu Mon Feb 23 09:48:40 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:48:40 -0800 Subject: Problem metalica 2004-02-21 09:12:10: Cryo temp 19k Message-ID: cryo being regend From jhaydon at snf.stanford.edu Mon Feb 23 09:49:01 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:49:01 -0800 Subject: Problem metalica 2004-02-23 09:43:04: cryo needs regen, temp >20K Message-ID: cryo being regend From jhaydon at snf.stanford.edu Mon Feb 23 09:49:39 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:49:39 -0800 Subject: Problem metalica 2004-02-23 09:49:38: cryo being regend should be back up late this after noon Message-ID: From jperez at snf.stanford.edu Tue Feb 24 13:34:31 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Feb 2004 13:34:31 -0800 Subject: Problem metalica 2004-02-23 09:49:38: cryo being regend should be back up late this after noon Message-ID: Regen completed From gu at snf.stanford.edu Tue Feb 24 18:43:58 2004 From: gu at snf.stanford.edu (gu at snf.stanford.edu) Date: Tue, 24 Feb 2004 18:43:58 -0800 Subject: Problem metalica 2004-02-24 18:43:58: temperature for cryopump is higher than 18 K Message-ID: before using, it was 18 K. From jperez at snf.stanford.edu Wed Feb 25 07:53:05 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 25 Feb 2004 07:53:05 -0800 Subject: Shutdown metalica 2004-02-25 07:53:05: Down for regen Message-ID: From jperez at snf.stanford.edu Wed Feb 25 08:00:45 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 25 Feb 2004 08:00:45 -0800 Subject: Shutdown metalica 2004-02-25 07:53:05: Down for regen Message-ID: From mcvittie at snf.stanford.edu Wed Feb 25 20:23:47 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 25 Feb 2004 20:23:47 -0800 Subject: Comment metalica 2004-02-08 12:34:16: Cyropump needs regen Message-ID: From mcvittie at snf.stanford.edu Wed Feb 25 20:24:16 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 25 Feb 2004 20:24:16 -0800 Subject: Comment metalica 2004-02-11 02:19:03: No Comments Why Metallica Is Down Message-ID: Pump was regen. jim From mcvittie at snf.stanford.edu Wed Feb 25 20:24:40 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 25 Feb 2004 20:24:40 -0800 Subject: Comment metalica 2004-02-18 18:26:10: pump temperature is about 20K Message-ID: Pump was regen From mcvittie at snf.stanford.edu Wed Feb 25 20:24:47 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 25 Feb 2004 20:24:47 -0800 Subject: Problem metalica 2004-02-24 18:43:58: temperature for cryopump is higher than 18 K Message-ID: From jhaydon at snf.stanford.edu Fri Feb 27 10:46:51 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 27 Feb 2004 10:46:51 -0800 Subject: Problem metalica 2004-02-27 10:46:50: down for regen Message-ID: From matteoja at snf.stanford.edu Sun Feb 29 14:24:11 2004 From: matteoja at snf.stanford.edu (matteoja at snf.stanford.edu) Date: Sun, 29 Feb 2004 14:24:11 -0800 Subject: Problem metalica 2004-02-29 14:24:10: cryopump @ 18 Message-ID: will need regen soon