From giulia at snf.stanford.edu Sat Apr 2 09:18:27 2005 From: giulia at snf.stanford.edu (giulia at snf.stanford.edu) Date: Sat, 2 Apr 2005 09:18:27 -0800 Subject: Problem metalica SNF 2005-04-02 09:18:27: base pressure didn't reach 150mT Message-ID: From jhaydon at snf.stanford.edu Mon Apr 4 16:14:28 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 4 Apr 2005 16:14:28 -0700 Subject: Problem metalica SNF 2005-04-02 09:18:27: base pressure didn't reach 150mT Message-ID: may not have closed the let up valve all the way. it was working fine this morning From sjo at snf.stanford.edu Sat Apr 23 22:08:24 2005 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Sat, 23 Apr 2005 22:08:24 -0700 Subject: Problem metalica SNF 2005-04-23 22:08:24: Al target almost used up Message-ID: The Al target needs to be replaced soon. From jperez at snf.stanford.edu Mon Apr 25 07:37:38 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Apr 2005 07:37:38 -0700 Subject: Comment metalica SNF 2005-03-18 18:12:48: target A: power not stable during deposition Message-ID: From jperez at snf.stanford.edu Mon Apr 25 07:39:07 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Apr 2005 07:39:07 -0700 Subject: Problem metalica SNF 2005-04-23 22:08:24: Al target almost used up Message-ID: Added new Al target in Lab box. From oday at snf.stanford.edu Tue Apr 26 20:48:09 2005 From: oday at snf.stanford.edu (oday at snf.stanford.edu) Date: Tue, 26 Apr 2005 20:48:09 -0700 Subject: Problem metalica SNF 2005-04-26 20:48:08: roughing pump not working Message-ID: After finishing for the night I tried roughing down to 150, but it would not do it. after half an hour I closed the valve. From jhaydon at snf.stanford.edu Wed Apr 27 08:34:47 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 27 Apr 2005 08:34:47 -0700 Subject: Shutdown metalica SNF 2005-04-27 08:34:46: cryo was at 156 k starting regen Message-ID: From jhaydon at snf.stanford.edu Wed Apr 27 14:40:33 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 27 Apr 2005 14:40:33 -0700 Subject: Shutdown metalica SNF 2005-04-27 08:34:46: cryo was at 156 k starting regen Message-ID: cryo back to temp ok to use From jhaydon at snf.stanford.edu Wed Apr 27 14:41:13 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 27 Apr 2005 14:41:13 -0700 Subject: Problem metalica SNF 2005-04-26 20:48:08: roughing pump not working Message-ID: may have left vent valve partialy opened From oday at snf.stanford.edu Thu Apr 28 20:02:19 2005 From: oday at snf.stanford.edu (oday at snf.stanford.edu) Date: Thu, 28 Apr 2005 20:02:19 -0700 Subject: Problem metalica SNF 2005-04-28 20:02:18: Cryo pump temperature Message-ID: While unloading wafers I noticed cryo pump temp indicates "cryo off" and the temp rising to 26K. I double checked gate valve and it was closed. Then roughed down the chamber and hoped it would recover, but the temp kept increasing. From oday at snf.stanford.edu Thu Apr 28 20:11:29 2005 From: oday at snf.stanford.edu (oday at snf.stanford.edu) Date: Thu, 28 Apr 2005 20:11:29 -0700 Subject: Shutdown metalica SNF 2005-04-28 20:11:28: Cryo pump temperature Message-ID: During sample unload, I noticed temp rising to 26K. I double checked the gate valve and it was closed. I then roughed down the chamber hoping it would recover, but it kept rising and is now at 58K. From cbaxter at snf.stanford.edu Thu Apr 28 23:10:08 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 28 Apr 2005 23:10:08 -0700 Subject: Shutdown metalica SNF 2005-04-28 20:11:28: Cryo pump temperature Message-ID: regen completed From cbaxter at snf.stanford.edu Thu Apr 28 23:10:21 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 28 Apr 2005 23:10:21 -0700 Subject: Problem metalica SNF 2005-04-28 20:02:18: Cryo pump temperature Message-ID: regen completed