From ianchan at snf.stanford.edu Wed Jul 6 16:45:17 2005 From: ianchan at snf.stanford.edu (ianchan at snf.stanford.edu) Date: Wed, 6 Jul 2005 16:45:17 -0700 Subject: Problem metalica SNF 2005-07-06 16:45:16: purple (oxidation) of circular shields Message-ID: I noticed purple oxidation of the tube-shaped shields and the target holders when I open the chamber. Please check for problems. From jhaydon at snf.stanford.edu Tue Jul 12 08:45:18 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 12 Jul 2005 08:45:18 -0700 Subject: Problem metalica SNF 2005-07-06 16:45:16: purple (oxidation) of circular shields Message-ID: this happens with some materials From kimsangb at snf.stanford.edu Sat Jul 16 04:11:56 2005 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Sat, 16 Jul 2005 04:11:56 -0700 Subject: Problem metalica SNF 2005-07-16 04:11:56: roughing pump Message-ID: Roughing pump only works down to 160~170 mTorr. From me342b at snf.stanford.edu Mon Jul 18 23:55:54 2005 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Mon, 18 Jul 2005 23:55:54 -0700 Subject: Problem metalica SNF 2005-07-18 23:55:53: Roughing valve handle loose Message-ID: The set screw for the roughing valve fell out and into the LN2 container. It must be removed before container is filled with more liquid Nitrogen. From jperez at snf.stanford.edu Tue Jul 19 12:07:59 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 Jul 2005 12:07:59 -0700 Subject: Problem metalica SNF 2005-07-16 04:11:56: roughing pump Message-ID: Doesn't have to be right on 150 mTorr, +/- 10 mTorr will work From jperez at snf.stanford.edu Tue Jul 19 12:08:38 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 Jul 2005 12:08:38 -0700 Subject: Problem metalica SNF 2005-07-18 23:55:53: Roughing valve handle loose Message-ID: Replaced screw to the roughing valve handle From jperez at snf.stanford.edu Tue Jul 19 15:35:25 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 Jul 2005 15:35:25 -0700 Subject: Problem metalica SNF 2005-07-19 15:35:24: Metalica users are complainting about Metals Message-ID: Please be aware that some users are depositing one metal and when finished samples appear to have a slightly different metal in color. From eata at snf.stanford.edu Wed Jul 20 17:47:02 2005 From: eata at snf.stanford.edu (eata at snf.stanford.edu) Date: Wed, 20 Jul 2005 17:47:02 -0700 Subject: Problem metalica SNF 2005-07-20 17:47:00: possible leak Message-ID: Cr/Au films do not stick, they lift-off easily. happened before when there was water leak. From jperez at snf.stanford.edu Thu Jul 21 08:24:55 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jul 2005 08:24:55 -0700 Subject: Shutdown metalica SNF 2005-07-21 08:24:54: Metalica is down for testing! Message-ID: From jperez at snf.stanford.edu Thu Jul 21 15:15:27 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jul 2005 15:15:27 -0700 Subject: Shutdown metalica SNF 2005-07-21 08:24:54: Metalica is down for testing! Message-ID: Ran a Ti test and metal was the right color. Ran a test using Cr/Cu and metal again was the right color. The Argon pressure valve was at zero instead of 10 PSI. The STS PECVD system share the same gas line, so at zero Ar pressure you were getting N2/O2/? from STS PECVD. Along with this fix, the O2 line at Metalica was capped off. From jperez at snf.stanford.edu Thu Jul 21 15:17:39 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jul 2005 15:17:39 -0700 Subject: Problem metalica SNF 2005-07-20 17:47:00: possible leak Message-ID: We believe at this time Argon pressure or capping the O2 line has corrected hte lifting problem. From jperez at snf.stanford.edu Thu Jul 21 15:19:29 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jul 2005 15:19:29 -0700 Subject: Problem metalica SNF 2005-07-19 15:35:24: Metalica users are complainting about Metals Message-ID: Argon pressure was adjusted/ O2 line capped off incase that was the problem. Two Test ran today and metals were good. From jperez at snf.stanford.edu Thu Jul 21 15:20:20 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jul 2005 15:20:20 -0700 Subject: Problem metalica SNF 2005-07-21 15:20:19: Warning.......... Message-ID: From jperez at snf.stanford.edu Thu Jul 21 16:25:33 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jul 2005 16:25:33 -0700 Subject: Problem metalica SNF 2005-07-21 16:25:31: Caution when operating Metalica Message-ID: If your wafers are very important, you should run a test. Even though all went well today and we believe we know the problem, but until the two pieces of equipment are on separate Argon lines take caution. Users using STS PECVD may or can see pressure changes in Metalica (small) during deposition. From lzhang at snf.stanford.edu Sat Jul 23 21:03:28 2005 From: lzhang at snf.stanford.edu (lzhang at snf.stanford.edu) Date: Sat, 23 Jul 2005 21:03:28 -0700 Subject: Problem metalica SNF 2005-07-23 21:03:28: oday left both mechenic and cryo pump valve after finishing the run Message-ID: From cbaxter at snf.stanford.edu Thu Jul 28 17:00:04 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 28 Jul 2005 17:00:04 -0700 Subject: Problem metalica SNF 2005-07-23 21:03:28: oday left both mechenic and cryo pump valve after finishing the run Message-ID: From rcrane at snf.stanford.edu Fri Jul 29 16:16:38 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 29 Jul 2005 16:16:38 -0700 Subject: Problem metalica SNF 2005-07-21 15:20:19: Warning.......... Message-ID: From rcrane at snf.stanford.edu Fri Jul 29 16:18:44 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 29 Jul 2005 16:18:44 -0700 Subject: Problem metalica SNF 2005-07-21 16:25:31: Caution when operating Metalica Message-ID: Ar pressure has been adjusted. System is operation in the same manner as it has been for the last ten years. A separate Ar regulator/source line will be installed in two weeks. Dick