Shutdown metalica SNF 2005-07-21 08:24:54: Metalica is down for testing!

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jul 21 15:15:27 PDT 2005


Ran a Ti test and metal was the right color.
Ran a test using Cr/Cu and metal again was the right color.
The Argon pressure valve was at zero instead of 10 PSI.
The STS PECVD system share the same gas line, so at zero 
Ar pressure you were getting N2/O2/? from STS PECVD.
Along with this fix, the O2 line at Metalica was capped off.




More information about the metalica-pcs mailing list