Problem metalica SNF 2005-07-21 16:25:31: Caution when operating Metalica

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jul 21 16:25:33 PDT 2005


If your wafers are very important, you should run a test. Even 
though all went well today and we believe we know the problem, but until the two pieces of equipment are on separate Argon
lines take caution. Users using STS PECVD may or can see 
pressure changes in Metalica (small) during deposition.




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