From amyers at snf.stanford.edu Thu May 5 22:46:00 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Thu, 5 May 2005 22:46:00 -0700 Subject: Problem metalica SNF 2005-05-05 22:46:00: this tool is killing me!!!!! Message-ID: target b shorted on me twice tonight after pumping down. I had to give up for the night. It also happend to me twice on Tuesday and I had to stay an extra 2 hours until 2am. The same thing happend to EATA on Tuesday after I was finished. I would like a credit of tonights time and 2 hours of Tuesday's time. From jhaydon at snf.stanford.edu Mon May 9 08:46:00 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 May 2005 08:46:00 -0700 Subject: Problem metalica SNF 2005-05-05 22:46:00: this tool is killing me!!!!! Message-ID: target holder has been changed From amyers at snf.stanford.edu Mon May 9 13:56:20 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Mon, 9 May 2005 13:56:20 -0700 Subject: Problem metalica SNF 2005-05-09 13:56:17: oxygen leak in chamber? Message-ID: I was running Ti on both targets. Films came out deep purple. Ranier used the same two targets after me. Here are his results. 1. First wafer ran on target b for 5 minutes came out perfect. 2. Second wafer ran on target b for 5 minutes after 5 minutes cool came out slight dark. 3. Third wafer ran on target a for 5 minutes after 5 minutes cool came out light purple. 4. Forth wafer ran on target a for 5 minutes after 5 minutes cool came out deep purple. I had the same problem last week when I sputtered Ti I also noticed the pressure is much less stable in recent weeks. We also noticed on runs 3 and 4 of Ranier's test that the pressure went down on target a when the plasma went down indicating oxygen gettering From jhaydon at snf.stanford.edu Mon May 9 15:42:51 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 May 2005 15:42:51 -0700 Subject: Shutdown metalica SNF 2005-05-09 15:42:50: probable air leak Message-ID: From jhaydon at snf.stanford.edu Mon May 9 16:09:04 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 May 2005 16:09:04 -0700 Subject: Shutdown metalica SNF 2005-05-09 15:42:50: probable air leak Message-ID: From amyers at snf.stanford.edu Mon May 9 17:44:01 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Mon, 9 May 2005 17:44:01 -0700 Subject: Comment metalica SNF 2005-05-09 17:44:00: thing seem better post fix Message-ID: pressure now stable targets no longer discolored the test wafers going in looked bad so its hard to tell. I think the fix worked but time will tell I'm doing more Ti on Wednesday so that will be the definativew test for me From amyers at snf.stanford.edu Thu May 12 09:27:51 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Thu, 12 May 2005 09:27:51 -0700 Subject: Comment metalica SNF 2005-05-12 09:27:50: Ti wafers processed yesterday Message-ID: all three looked good. Tool appears to be fixed From jhaydon at snf.stanford.edu Thu May 12 09:54:23 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 12 May 2005 09:54:23 -0700 Subject: Comment metalica SNF 2005-03-18 18:11:30: target A: power was not stable Message-ID: problem has not reocurred From jhaydon at snf.stanford.edu Thu May 12 09:54:44 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 12 May 2005 09:54:44 -0700 Subject: Problem metalica SNF 2005-05-09 13:56:17: oxygen leak in chamber? Message-ID: leak has been repaired From zhangy at snf.stanford.edu Thu May 12 20:42:02 2005 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Thu, 12 May 2005 20:42:02 -0700 Subject: Shutdown metalica SNF 2005-05-12 20:42:02: the system is down Message-ID: I'm very sorry that I made a big mistake after depostion. After the wafers are deposited, I forgot to close the gate valve and directly opened the N2 vent valve. I didn't realize this problem until al l the wafers are taken out. As a result, the cryo pump temperature increased dramatically, it became 140K quickly. Then I just cclosed the gate valve, and opened the roughing valve to pump down the chamber to 150mT, and did the normal shutdown. So now the system is in its standby status, except that the temperature is very high. I'm really sorry about the unconvenience to other users!!! From jhaydon at snf.stanford.edu Fri May 13 09:16:55 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 13 May 2005 09:16:55 -0700 Subject: Shutdown metalica SNF 2005-05-12 20:42:02: the system is down Message-ID: metalica is back up From jperez at snf.stanford.edu Thu May 26 14:51:13 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2005 14:51:13 -0700 Subject: Comment metalica SNF 2005-05-09 17:44:00: thing seem better post fix Message-ID: Allan fixed what he didn't like with his target From jperez at snf.stanford.edu Thu May 26 14:51:38 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2005 14:51:38 -0700 Subject: Comment metalica SNF 2005-05-12 09:27:50: Ti wafers processed yesterday Message-ID: Looked good for Allan