From crichter at snf.stanford.edu Thu Nov 10 17:10:05 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 10 Nov 2005 17:10:05 -0800 Subject: Comment metalica SNF 2005-11-10 17:10:05: Metalica Timer Battery Needs Replacing Message-ID: Timer sometimes goes blank during deposition timing. From crichter at snf.stanford.edu Thu Nov 10 17:43:46 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 10 Nov 2005 17:43:46 -0800 Subject: Problem metalica SNF 2005-11-10 17:43:44: Arcing Message-ID: After turning system on to begin plasma, the Arc light indicator lights up. From crichter at snf.stanford.edu Thu Nov 10 18:06:46 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 10 Nov 2005 18:06:46 -0800 Subject: Problem metalica SNF 2005-11-10 18:06:46: more info on arcing problem Message-ID: the target status for gun B as "ok" when this happened. Also thesomewhat new (starting thickness= 0.07130") target used was chromium From crichter at snf.stanford.edu Thu Nov 10 18:23:30 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 10 Nov 2005 18:23:30 -0800 Subject: Problem metalica SNF 2005-11-10 18:23:28: Target status change....also related to arcing Message-ID: I stopped my process and began shutdown. When the system was vented, the target status turned to red. After removing the components for gun B, the target status was green again. I noticed that my silicon dummy wafer ( with a 3" substrate affixed to this wafer) showed signs of flaking. From jperez at snf.stanford.edu Mon Nov 14 08:08:36 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Nov 2005 08:08:36 -0800 Subject: Comment metalica SNF 2005-10-27 12:42:08: One of Cr targets down to 1mm Message-ID: Replace Cr target! From jperez at snf.stanford.edu Mon Nov 14 08:09:26 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Nov 2005 08:09:26 -0800 Subject: Comment metalica SNF 2005-11-10 17:10:05: Metalica Timer Battery Needs Replacing Message-ID: Pressed batteries down all the way flat and time ran OK. From crichter at snf.stanford.edu Mon Nov 28 12:02:09 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 28 Nov 2005 12:02:09 -0800 Subject: Comment metalica SNF 2005-11-28 12:02:08: Metalica in 'empty' mode was left with gate valve open Message-ID: Also the Metalica Target Tester was in the "HV Enable" position. From parco at snf.stanford.edu Tue Nov 29 06:57:55 2005 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 29 Nov 2005 06:57:55 -0800 Subject: Shutdown metalica SNF 2005-11-29 06:57:52: cryo pump on-board message Message-ID: cryo pump on-board message says "68K,11K, OFF" this morning. Not normal response on monitor.... From jperez at snf.stanford.edu Tue Nov 29 09:24:06 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:24:06 -0800 Subject: Shutdown metalica SNF 2005-11-29 06:57:52: cryo pump on-board message Message-ID: Cryo temperature is at 11K, OK to use. From jperez at snf.stanford.edu Tue Nov 29 09:26:05 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:26:05 -0800 Subject: Problem metalica SNF 2005-11-10 18:23:28: Target status change....also related to arcing Message-ID: Sounds like we need to change the dummy wafer.