From jperez at snf.stanford.edu Mon Sep 19 08:41:10 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 19 Sep 2005 08:41:10 -0700 Subject: Problem metalica SNF 2005-08-19 14:19:03: Pressure unstable for the first three times power turned on Message-ID: Ran four wafers on Friday 9/16/05 without pressure drifting. Pressure stable from start to finish on all four wafers. From crichter at snf.stanford.edu Tue Sep 27 15:46:51 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 27 Sep 2005 15:46:51 -0700 Subject: Problem metalica SNF 2005-09-27 15:46:50: Pressure not low enough (~30mTorr) when opening the gate valve Message-ID: No runs were done. Did not even get to the ion gage step. From crichter at snf.stanford.edu Tue Sep 27 15:48:47 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 27 Sep 2005 15:48:47 -0700 Subject: Problem metalica SNF 2005-09-27 15:48:46: More on Pressure problem Message-ID: According to Jeannie, the machine may not be operational. THe vaccuum is not low enough to make the ion gage operational. However, it was recommended to put this on yellow light status. From crichter at snf.stanford.edu Tue Sep 27 17:36:31 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 27 Sep 2005 17:36:31 -0700 Subject: Comment metalica SNF 2005-09-27 17:36:30: System is pumping down normally and ion gauge is working Message-ID: Ed helped me out and it was determined that the system is pumping down and the ion gauge is operational. I am running depositions. The base pressure readings however are still off. From jperez at snf.stanford.edu Thu Sep 29 07:05:33 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Sep 2005 07:05:33 -0700 Subject: Problem metalica SNF 2005-09-27 15:46:50: Pressure not low enough (~30mTorr) when opening the gate valve Message-ID: Continued processing per Ed Myers From jperez at snf.stanford.edu Thu Sep 29 07:05:59 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Sep 2005 07:05:59 -0700 Subject: Problem metalica SNF 2005-09-27 15:48:46: More on Pressure problem Message-ID: continued processing per Ed Myers From jperez at snf.stanford.edu Thu Sep 29 07:06:33 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Sep 2005 07:06:33 -0700 Subject: Comment metalica SNF 2005-09-27 17:36:30: System is pumping down normally and ion gauge is working Message-ID: Continued processing From crichter at snf.stanford.edu Thu Sep 29 17:09:34 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 29 Sep 2005 17:09:34 -0700 Subject: Comment metalica SNF 2005-09-29 17:09:33: Timer needs new battery Message-ID: Timer is stuck at 7 minutes From crichter at snf.stanford.edu Thu Sep 29 18:58:49 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 29 Sep 2005 18:58:49 -0700 Subject: Problem metalica SNF 2005-09-29 18:58:47: Cylinder for Target A shows signs of flaking Message-ID: The flaking was not present prior to the deposition runs.