Problem metalica SNF 2005-08-19 14:19:03: Pressure unstable for the first three times power turned on

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Sep 19 08:41:10 PDT 2005


Ran four wafers on Friday  9/16/05 without pressure drifting.
Pressure stable from start to finish on all four wafers.




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