Problem metalica SNF 2006-08-15 13:52:50: Chiller down, Can't run any RF sputter depositions

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Dec 12 09:45:12 PST 2006


RF capability will be available only upon request.  Please consult SpecMat and Process Staff about arranging for RF capability.




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