From jperez at snf.stanford.edu Tue Jan 3 15:12:08 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Jan 2006 15:12:08 -0800 Subject: Comment metalica SNF 2005-12-14 14:25:21: New Cylinder for Metalica Message-ID: Replaced all used parts with clean parts From jperez at snf.stanford.edu Tue Jan 3 15:13:41 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Jan 2006 15:13:41 -0800 Subject: Problem metalica SNF 2005-12-13 16:40:23: update from previous post Message-ID: Too thick depositions for this equipment. Will evaluate. From jperez at snf.stanford.edu Tue Jan 3 15:15:02 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Jan 2006 15:15:02 -0800 Subject: Problem metalica SNF 2005-12-13 15:43:11: arcing light indictor going off Message-ID: The cathode has metal build-up From jperez at snf.stanford.edu Tue Jan 3 15:17:12 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Jan 2006 15:17:12 -0800 Subject: Comment metalica SNF 2005-11-28 12:02:08: Metalica in 'empty' mode was left with gate valve open Message-ID: Notified previous user From jperez at snf.stanford.edu Tue Jan 3 15:18:22 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Jan 2006 15:18:22 -0800 Subject: Problem metalica SNF 2005-12-11 16:01:02: One wafer is broken when opening the chamber Message-ID: Still can see silicon chips, will clean up. From jperez at snf.stanford.edu Mon Jan 9 10:09:38 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jan 2006 10:09:38 -0800 Subject: Problem metalica SNF 2005-11-10 18:06:46: more info on arcing problem Message-ID: I have ran many cycles with a variety of metals and did not have an arcing problem. From jperez at snf.stanford.edu Mon Jan 9 10:11:00 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jan 2006 10:11:00 -0800 Subject: Problem metalica SNF 2005-11-10 17:43:44: Arcing Message-ID: Since this was written up, I have operated Metalica many time with different metals and did not have an arcing problem. From crichter at snf.stanford.edu Fri Jan 13 17:03:02 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 13 Jan 2006 17:03:02 -0800 Subject: Problem metalica SNF 2006-01-13 17:03:01: INTLK indicator on Message-ID: No power! After switching to HV test, both targets gave a 'green light' target status. From wschlott at snf.stanford.edu Sat Jan 14 17:06:42 2006 From: wschlott at snf.stanford.edu (wschlott at snf.stanford.edu) Date: Sat, 14 Jan 2006 17:06:42 -0800 Subject: Comment metalica SNF 2006-01-14 17:06:42: seems to work fine Message-ID: Despite the problem reported on jan 13, I am not having any problems striking a plasma. The INTLK light is illuminated on the power supply, but I think that is usual when the machine is enabled. As far as I can tell all systems are go From crichter at snf.stanford.edu Sat Jan 14 20:15:23 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sat, 14 Jan 2006 20:15:23 -0800 Subject: Comment metalica SNF 2006-01-14 20:15:22: power isssues on metalica Message-ID: I'm glad the system is working. I don't understand what happened on my run on Friday. I used both guns with chromium targets so I can get a total film thickness of 0.6um. I had another 15 minutes to go before my run was done, but I had problems getting plasma to strike. After flipping the switch to the TEST mode and venting the chamber, both guns A and B were in 'green' status. I inspected both targets and the wafer to look for any physical signs of flaking or arcing. I couldn't find anything obvious. Any ideas on what may have happened? From crichter at snf.stanford.edu Mon Jan 16 15:16:31 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 16 Jan 2006 15:16:31 -0800 Subject: Comment metalica SNF 2006-01-16 15:16:30: low on liquid nitrogen Message-ID: From jperez at snf.stanford.edu Tue Jan 17 07:50:45 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Jan 2006 07:50:45 -0800 Subject: Problem metalica SNF 2006-01-13 17:03:01: INTLK indicator on Message-ID: OK from previous user. From jperez at snf.stanford.edu Tue Jan 17 07:51:04 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Jan 2006 07:51:04 -0800 Subject: Comment metalica SNF 2006-01-14 17:06:42: seems to work fine Message-ID: OK to use! From jperez at snf.stanford.edu Tue Jan 17 07:51:32 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Jan 2006 07:51:32 -0800 Subject: Comment metalica SNF 2006-01-14 20:15:22: power isssues on metalica Message-ID: Seems to be working! From jperez at snf.stanford.edu Tue Jan 17 08:06:08 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Jan 2006 08:06:08 -0800 Subject: Comment metalica SNF 2006-01-16 15:16:30: low on liquid nitrogen Message-ID: Tank has been changed. From parco at snf.stanford.edu Tue Jan 17 11:12:10 2006 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 17 Jan 2006 11:12:10 -0800 Subject: Problem metalica SNF 2006-01-17 11:12:09: gap between target & gun B Message-ID: I have noticed recently that a gap is formin (~1 to 2mm???) on the Gun B contact. I have tried to compensate the gap between the target and Gun B contact with more contact grease to allow difference. There were no signs of arcing activities during deposition. But after the deposition and cleaning target(s) and gun(s), Gun B and the intended target showed signs of arcing soot building up. This was a 2min52sec (x2) of Ag sputtering. It's not hard to image what a 10 min can do. It's time to replace or resurface Gun B contact to avoid serious shutdown and setbacks. From parco at snf.stanford.edu Tue Jan 17 11:21:23 2006 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 17 Jan 2006 11:21:23 -0800 Subject: Problem metalica SNF 2006-01-17 11:21:23: signs of arcing but not during deposition Message-ID: I have noticed recently that a ring pattern has an indented feature on Gun B. It's about 1-2mm in-depth. I tried to compensate the differences by adding more than usual contact grease between the target and the contact gun. During deposition, there were no signs of arcing activities. But after deposition, removing and cleaning the target and Gun B showed signs of some to little scoring (arcing) build-up,and that was only a (x2) 2min52sec Ag depositions. Just image what a 10mins (> x3) can do. It's time to replace or resurface Gun B to avoid a serious shutdown and setback. From praveen at snf.stanford.edu Fri Jan 20 16:56:28 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Fri, 20 Jan 2006 16:56:28 -0800 Subject: Comment metalica SNF 2006-01-20 16:56:24: LN2 3/4th empty Message-ID: The liquid nitrogen for metalica is almost 3/4th empty From ktsunoda at snf.stanford.edu Tue Jan 31 15:01:00 2006 From: ktsunoda at snf.stanford.edu (ktsunoda at snf.stanford.edu) Date: Tue, 31 Jan 2006 15:01:00 -0800 Subject: Comment metalica SNF 2006-01-31 15:00:59: interlock switch Message-ID: The interlock switch has some trouble. Temporary repaired by the green cable. Pay attention NOT to touch the green cable when you rotate the sample.