Problem metalica SNF 2006-01-17 11:12:09: gap between target & gun B

parco at snf.stanford.edu parco at snf.stanford.edu
Tue Jan 17 11:12:10 PST 2006


I have noticed recently that a gap is formin (~1 to 2mm???) on the Gun B contact.  I have tried to compensate the gap between the target and Gun B contact with more contact grease to allow difference.  There were no signs of arcing activities during deposition.  But after the deposition and cleaning target(s) and gun(s), Gun B and the intended target showed signs of arcing soot building up.  This was a 2min52sec (x2) of Ag sputtering.  It's not hard to image what a 10 min can do.  It's time to replace or resurface Gun B contact to avoid serious shutdown and setbacks.




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