Problem metalica SNF 2006-01-17 11:21:23: signs of arcing but not during deposition

parco at snf.stanford.edu parco at snf.stanford.edu
Tue Jan 17 11:21:23 PST 2006


I have noticed recently that a ring pattern has an indented feature on Gun B.  It's about 1-2mm in-depth.  I tried to compensate the differences by adding more than usual contact grease between the target and the contact gun. 
During deposition, there were no signs of arcing activities.  But after deposition, removing and cleaning the target and Gun B showed signs of some to little scoring (arcing) build-up,and that was only a (x2) 2min52sec Ag depositions.  Just image what a 10mins (> x3) can do.  
It's time to replace or resurface Gun B to avoid a serious shutdown and setback.




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