Problem metalica SNF 2006-09-20 14:50:18: Base pressure does not reach 150mTorr before pumping down the chamber

crichter at snf.stanford.edu crichter at snf.stanford.edu
Wed Sep 20 14:50:19 PDT 2006


Pressure reading is at ~200mTorr. When the gate valve was opened all the way, the pressure dropped and stayed around 13-15mTorr. 




More information about the metalica-pcs mailing list