Problem metalica SNF 2006-09-20 14:50:18: Base pressure does not reach 150mTorr before pumping down the chamber

crichter at crichter at
Wed Sep 20 14:50:19 PDT 2006

Pressure reading is at ~200mTorr. When the gate valve was opened all the way, the pressure dropped and stayed around 13-15mTorr. 

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