From aeonia at snf.stanford.edu Mon May 7 00:53:14 2007 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Mon, 7 May 2007 00:53:14 -0700 Subject: Problem metalica SNF 2007-05-07 00:53:14: target status 'not OK' Message-ID: the test panel target status is 'not OK' From jhaydon at snf.stanford.edu Mon May 7 15:42:45 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 7 May 2007 15:42:45 -0700 Subject: Problem metalica SNF 2007-05-07 00:53:14: target status 'not OK' Message-ID: sticking relay lubricated relay no longer sticking From gibby at snf.stanford.edu Tue May 8 18:41:17 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 8 May 2007 18:41:17 -0700 Subject: Comment metalica SNF 2007-05-08 18:41:16: Rough Pump slow Message-ID: The rough pump seems to take a long time to reach the crossover point. Once the gate valve is open, the system seems to pump fine. Also, the power supply is making an audible clicking noise when it is turned on. Once the power supply has reached the setpoint, there is no more noise. It doesn't seem serious, but I don't ever remember hearing the power supply before. From gibby at snf.stanford.edu Wed May 9 11:57:14 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 9 May 2007 11:57:14 -0700 Subject: Comment metalica SNF 2007-05-09 11:57:13: Rough left on Message-ID: The last user left the roughing valve open. The cold trap was empty when I closed the valve. Not sure what the effect on the system would be. As an aside, the rough pump haas probably been pumping on the system for two hours and the pressure was still not under the black mark on the pressure gauge. This confirms my observation from last night that the rough pump is not pumping as quickly as it used to. From jperez at snf.stanford.edu Fri May 11 08:19:28 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 May 2007 08:19:28 -0700 Subject: Comment metalica SNF 2007-05-09 11:57:13: Rough left on Message-ID: Thanks, notified previous user. From jperez at snf.stanford.edu Thu May 17 07:26:27 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 17 May 2007 07:26:27 -0700 Subject: Comment metalica SNF 2007-05-08 18:41:16: Rough Pump slow Message-ID: Used roughing pump several times and taking standard time five minutes. From jperez at snf.stanford.edu Fri May 18 12:03:37 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 May 2007 12:03:37 -0700 Subject: Problem metalica SNF 2007-05-18 12:03:37: Source gun A didn't strike plasma. Message-ID: Cr loaded twice and both times didn't strike plasma. From jperez at snf.stanford.edu Fri May 18 14:34:14 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 May 2007 14:34:14 -0700 Subject: Problem metalica SNF 2007-05-18 12:03:37: Source gun A didn't strike plasma. Message-ID: Rakesh switched the Cr from source gun A to source gun B. Again Cr didn't strike plasma , but this time on A source gun. So I have removed the Cr target and replaced with a new Cr target. The Au target struck on both A and B source gun. From lwchang at snf.stanford.edu Mon May 21 16:26:48 2007 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Mon, 21 May 2007 16:26:48 -0700 Subject: Problem metalica SNF 2007-05-21 16:26:47: Target A(Ti) arcing / Target B(Cu) fluctuacted Message-ID: From lwchang at snf.stanford.edu Tue May 22 17:16:27 2007 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 22 May 2007 17:16:27 -0700 Subject: Problem metalica SNF 2007-05-22 17:16:26: test mode target not ok Message-ID: checked using multimeter R>2M ohm. Switch yo HV mode then target status OK. Run Ti @ 75W ok. From mitsuru at snf.stanford.edu Tue May 22 21:55:55 2007 From: mitsuru at snf.stanford.edu (mitsuru at snf.stanford.edu) Date: Tue, 22 May 2007 21:55:55 -0700 Subject: Comment metalica SNF 2007-05-22 21:55:55: target status becomes ok Message-ID: The "target status" becomes "ok" after reloding the parts. Powder of wafer exists around the target folder and the bottom of chamber. I cleaned up around the target folder. From jperez at snf.stanford.edu Thu May 31 14:17:51 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2007 14:17:51 -0700 Subject: Comment metalica SNF 2007-05-22 21:55:55: target status becomes ok Message-ID: Thanks for the information