From huangzb at snf.stanford.edu  Sat Aug  2 15:29:13 2008
From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu)
Date: Sat, 2 Aug 2008 15:29:13 -0700
Subject: Shutdown metalica SNF 2008-08-02 15:29:12: ion gauge 1 did not work
Message-ID: <mailman.993.1357938529.25834.metalica-pcs@snf.stanford.edu>

IG1 did not display pressure.



From jhaydon at snf.stanford.edu  Mon Aug  4 07:16:08 2008
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Mon, 4 Aug 2008 07:16:08 -0700
Subject: Shutdown metalica SNF 2008-08-02 15:29:12: ion gauge 1 did not work
Message-ID: <mailman.994.1357938529.25834.metalica-pcs@snf.stanford.edu>

ion gauge appears to work



From jhaydon at snf.stanford.edu  Mon Aug 18 16:39:55 2008
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Mon, 18 Aug 2008 16:39:55 -0700
Subject: Problem metalica SNF 2008-08-18 16:39:53: cryo in regen
Message-ID: <mailman.995.1357938529.25834.metalica-pcs@snf.stanford.edu>

ok to use when temperature has been reached around around 5:30 pm



From jperez at snf.stanford.edu  Tue Aug 19 07:06:18 2008
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 19 Aug 2008 07:06:18 -0700
Subject: Problem metalica SNF 2008-08-18 16:39:53: cryo in regen
Message-ID: <mailman.996.1357938529.25834.metalica-pcs@snf.stanford.edu>

Regen completed after power was lost.



From popomoo at snf.stanford.edu  Tue Aug 19 22:24:49 2008
From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu)
Date: Tue, 19 Aug 2008 22:24:49 -0700
Subject: Problem metalica SNF 2008-08-19 22:24:48: arcing problem
Message-ID: <mailman.997.1357938529.25834.metalica-pcs@snf.stanford.edu>

I tried to deposit Al 200nm, so I used 100W for 10min. cooled off for 10min., and then again tried to use 100W for 10min. But, at the second trial, there was an arcing problem, and it didn't stop for about 1min. So, I just stopped doing it. 



From jperez at snf.stanford.edu  Wed Aug 20 07:04:28 2008
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 20 Aug 2008 07:04:28 -0700
Subject: Problem metalica SNF 2008-08-19 22:24:48: arcing problem
Message-ID: <mailman.998.1357938529.25834.metalica-pcs@snf.stanford.edu>

Should stop sooner then 1 minute. Turn down the power using  the dummy wafer. Begin bring up the power. Aluminum may
stablize at 99/ 98 watts. 



From huangzb at snf.stanford.edu  Thu Aug 21 20:00:54 2008
From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu)
Date: Thu, 21 Aug 2008 20:00:54 -0700
Subject: Problem metalica SNF 2008-08-21 20:00:53: timer missing
Message-ID: <mailman.999.1357938529.25834.metalica-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Mon Aug 25 08:01:51 2008
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 25 Aug 2008 08:01:51 -0700
Subject: Problem metalica SNF 2008-08-21 20:00:53: timer missing
Message-ID: <mailman.1000.1357938529.25834.metalica-pcs@snf.stanford.edu>

Not a tool problem.



From chingmei at snf.stanford.edu  Tue Aug 26 17:02:17 2008
From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu)
Date: Tue, 26 Aug 2008 17:02:17 -0700
Subject: Problem metalica SNF 2008-08-26 17:02:16: plasma was not stable
Message-ID: <mailman.1001.1357938529.25834.metalica-pcs@snf.stanford.edu>

The power went down to 2 and back to 100w several times 
when I was doing deposition.