Problem metalica SNF 2008-08-19 22:24:48: arcing problem

popomoo at snf.stanford.edu popomoo at snf.stanford.edu
Tue Aug 19 22:24:49 PDT 2008


I tried to deposit Al 200nm, so I used 100W for 10min. cooled off for 10min., and then again tried to use 100W for 10min. But, at the second trial, there was an arcing problem, and it didn't stop for about 1min. So, I just stopped doing it. 




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