From shanewang at snf.stanford.edu Wed Jun 4 14:40:54 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Wed, 4 Jun 2008 14:40:54 -0700 Subject: Problem metalica SNF 2008-06-04 14:40:53: Target A fails for Cu deposition Message-ID: Target A with Cu has contact issue. During installation of the target, the target is not always at OK status. The plasma was good for my first wafer (dummy) but failed for my second one during depositon. Then no plasma can be fired up. From jperez at snf.stanford.edu Thu Jun 5 07:13:29 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 5 Jun 2008 07:13:29 -0700 Subject: Problem metalica SNF 2008-06-04 14:40:53: Target A fails for Cu deposition Message-ID: I ran A and B source gun on 6/3./08 without any problems. This seems more of a setup problem or target. I'll remove that target if you let me know which one it was. There are three Cu targets in the box. From jhaydon at snf.stanford.edu Tue Jun 24 07:08:00 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 24 Jun 2008 07:08:00 -0700 Subject: Shutdown metalica SNF 2008-06-24 07:07:59: regen should be back up late morning Message-ID: From jperez at snf.stanford.edu Tue Jun 24 14:01:20 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Jun 2008 14:01:20 -0700 Subject: Shutdown metalica SNF 2008-06-24 07:07:59: regen should be back up late morning Message-ID: Regen has been completed. OK to use. From jperez at snf.stanford.edu Thu Jun 26 14:26:08 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Jun 2008 14:26:08 -0700 Subject: Problem metalica SNF 2008-06-26 14:26:08: N2 valve is stuck open. Too tight to turn off Message-ID: From masato at snf.stanford.edu Thu Jun 26 18:55:59 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Thu, 26 Jun 2008 18:55:59 -0700 Subject: Comment metalica SNF 2008-06-26 18:55:58: Loose N2 valve? Message-ID: It seems that N2 valve needs to be closed more tightly than before to make the base pressure reach below 150mTorr. From chongxie at snf.stanford.edu Thu Jun 26 23:12:12 2008 From: chongxie at snf.stanford.edu (chongxie at snf.stanford.edu) Date: Thu, 26 Jun 2008 23:12:12 -0700 Subject: Comment metalica SNF 2008-06-26 23:12:11: Message-ID: From chongxie at snf.stanford.edu Thu Jun 26 23:13:35 2008 From: chongxie at snf.stanford.edu (chongxie at snf.stanford.edu) Date: Thu, 26 Jun 2008 23:13:35 -0700 Subject: Problem metalica SNF 2008-06-26 23:13:35: vaccum never reach e-6 Message-ID: The vaccum stopped at 3e-5 after 1 hr pumping. From jperez at snf.stanford.edu Fri Jun 27 07:24:43 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jun 2008 07:24:43 -0700 Subject: Problem metalica SNF 2008-06-26 14:26:08: N2 valve is stuck open. Too tight to turn off Message-ID: The N2 valve froze up, Jim Haydon has replaced it. From emyers at snf.stanford.edu Fri Jun 27 16:34:24 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 27 Jun 2008 16:34:24 -0700 Subject: Comment metalica SNF 2008-06-27 16:34:23: Poor Plumbing Design Message-ID: I found the Ar whitey valve slightly ajar. This was allowing Ar in the chamber during pumpdown making it look like a leak. Stopping the Ar flow the base pressure quickly dropped to E-7 range. This needs to be redesigned.... From ccwan at snf.stanford.edu Fri Jun 27 19:18:05 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Fri, 27 Jun 2008 19:18:05 -0700 Subject: Problem metalica SNF 2008-06-27 19:18:04: Pump down problem Message-ID: Didn't manage to use it at the end since pressure didn't go down to 1e-6. Instead it stayed at roughly 1.5e-4 after 1 hour 15 minutes pumping. From takane at snf.stanford.edu Sat Jun 28 18:24:01 2008 From: takane at snf.stanford.edu (takane at snf.stanford.edu) Date: Sat, 28 Jun 2008 18:24:01 -0700 Subject: Comment metalica SNF 2008-06-28 18:24:00: pumped ok, cryo temp high Message-ID: Base pressure reached 5e-7 after 1hr and 45min. However the cryo temperature seems a little high (15K). From jperez at snf.stanford.edu Mon Jun 30 07:11:31 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Jun 2008 07:11:31 -0700 Subject: Problem metalica SNF 2008-06-26 23:13:35: vaccum never reach e-6 Message-ID: Jim Hayden tigthen new N2 valve. From jperez at snf.stanford.edu Mon Jun 30 07:12:17 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Jun 2008 07:12:17 -0700 Subject: Comment metalica SNF 2008-06-26 23:12:11: Message-ID: This was the N2 valve that got stuck. From jhaydon at snf.stanford.edu Mon Jun 30 13:52:38 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 30 Jun 2008 13:52:38 -0700 Subject: Problem metalica SNF 2008-06-27 19:18:04: Pump down problem Message-ID: The new N2 valve may require a little more effort to close than the old one. The system should have been in the e-5 with ina few minutes so you must have had a big leak some where. From filip at snf.stanford.edu Mon Jun 30 16:18:46 2008 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 30 Jun 2008 16:18:46 -0700 Subject: Problem metalica SNF 2008-06-30 16:18:46: out of LN2 Message-ID: the tank in the back is completely empty.