Problem metalica SNF 2008-06-04 14:40:53: Target A fails for Cu deposition

shanewang at snf.stanford.edu shanewang at snf.stanford.edu
Wed Jun 4 14:40:54 PDT 2008


Target A with Cu has contact issue. During installation of the target, the target is not always at OK status.  The plasma was good for my first wafer (dummy) but failed for my second one during depositon. Then no plasma can be fired up.




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