Problem metalica SNF 2009-05-10 18:45:43: TargetA Not OK After Deposition Attempt

[dtschoen at snf.stanford.edu]

I was using TargetA to depostion Mo.  Loading the chamber seemed normal, and the testing panel showed OK.  After pumpdown, the testing panel still showed OK.  After following the instructions I attempted to start a deposition, but the plasma wouldn't strike.  I switched the panel back to test, and it showed Not OK.