Problem metalica SNF 2009-05-10 18:45:43: TargetA Not OK After Deposition Attempt

dtschoen at snf.stanford.edu dtschoen at snf.stanford.edu
Sun May 10 18:45:44 PDT 2009


I was using TargetA to depostion Mo.  Loading the chamber seemed normal, and the testing panel showed OK.  After pumpdown, the testing panel still showed OK.  After following the instructions I attempted to start a deposition, but the plasma wouldn't strike.  I switched the panel back to test, and it showed Not OK.




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