From jperez at snf.stanford.edu Mon Nov 2 13:13:36 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 2 Nov 2009 13:13:36 -0800 Subject: Problem metalica SNF 2009-11-02 13:13:35: Unable to shee through the View port Message-ID: From jhaydon at snf.stanford.edu Mon Nov 2 13:57:04 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Nov 2009 13:57:04 -0800 Subject: Problem metalica SNF 2009-11-02 13:13:35: Unable to shee through the View port Message-ID: replaced view port From ericp at snf.stanford.edu Tue Nov 3 00:45:00 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 3 Nov 2009 00:45:00 -0800 Subject: Comment metalica SNF 2009-11-03 00:44:59: found rough valve wide open, pump off Message-ID: pumped down and closed valve, turned pump off. From ajamo at snf.stanford.edu Wed Nov 11 01:52:58 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 11 Nov 2009 01:52:58 -0800 Subject: Problem metalica SNF 2009-11-11 01:52:58: NO CRYO POWER 2 Message-ID: Cryo temp was 13 when I started. I finished my dep with no problems. When I was done the panel that shows the Cryo temp has the message No Cryo Power 2. Probably will not pump down? From jhaydon at snf.stanford.edu Wed Nov 11 07:02:14 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 11 Nov 2009 07:02:14 -0800 Subject: Problem metalica SNF 2009-11-11 01:52:58: NO CRYO POWER 2 Message-ID: cryo temp ok now From ajamo at snf.stanford.edu Thu Nov 12 00:05:26 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 12 Nov 2009 00:05:26 -0800 Subject: Problem metalica SNF 2009-11-12 00:05:25: cryo power Message-ID: I did one run that went fine. Cryo temp was at 12K & gate valve closed TIGHT when I unloaded. I put in more wafers, closed the chamber, checked the cryo (still at 12K ). During/after roughing the chamber past 150 mt cryo power turned off. From jperez at snf.stanford.edu Thu Nov 12 07:24:40 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Nov 2009 07:24:40 -0800 Subject: Comment metalica SNF 2009-11-03 00:44:59: found rough valve wide open, pump off Message-ID: Thanks, From kyunglok at snf.stanford.edu Fri Nov 13 17:07:58 2009 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Fri, 13 Nov 2009 17:07:58 -0800 Subject: Problem metalica SNF 2009-11-13 17:07:58: Arcing Message-ID: When I tried to deposit Al, heavy arcing occurred at the first time. I slowly controlled the power controller I managed it. But there was an oscillation of power between 98W to 103W. It was periodic and it seemed to arc again when I saw the status of plasma through the view port. I don't know what have happened . It could be temporary or not. Maybe that would be great if the next user check the status of it (arcing or not). From ajamo at snf.stanford.edu Fri Nov 13 23:32:07 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 13 Nov 2009 23:32:07 -0800 Subject: Comment metalica SNF 2009-11-13 23:32:07: Ti/Au no arcing Message-ID: No arcing during Ti/Au deposition. From popomoo at snf.stanford.edu Sun Nov 15 16:38:46 2009 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sun, 15 Nov 2009 16:38:46 -0800 Subject: Problem metalica SNF 2009-11-15 16:38:45: no more swabs Message-ID: we need more swabs..... From jperez at snf.stanford.edu Mon Nov 16 08:59:31 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Nov 2009 08:59:31 -0800 Subject: Problem metalica SNF 2009-11-15 16:38:45: no more swabs Message-ID: I put two sizes of swab sticks in the roll around cart. Not enough users this weekend for all the swab sticks to be gone at Metalica. From jperez at snf.stanford.edu Mon Nov 16 09:01:28 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Nov 2009 09:01:28 -0800 Subject: Comment metalica SNF 2009-11-13 23:32:07: Ti/Au no arcing Message-ID: Thanks for the information. This means previous User target set-up wasn't correct or target problem. I will check From jperez at snf.stanford.edu Mon Nov 16 09:01:58 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Nov 2009 09:01:58 -0800 Subject: Problem metalica SNF 2009-11-12 00:05:25: cryo power Message-ID: Cryo went through Regen From jperez at snf.stanford.edu Mon Nov 16 09:12:47 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Nov 2009 09:12:47 -0800 Subject: Problem metalica SNF 2009-11-13 17:07:58: Arcing Message-ID: I checked the two Aluminum targets and they both look bad. I don't know which one was on Target A or B/ One target looks like it got very hot and started melting. The other target was less then 0.01 inches in highth. We remove targets less then 0.02 inches. Aluminum targets tend to arc when thickness volume is low. I'll replace both Al targets today. From kyunglok at snf.stanford.edu Wed Nov 18 02:54:59 2009 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Wed, 18 Nov 2009 02:54:59 -0800 Subject: Comment metalica SNF 2009-11-18 02:54:58: Cr targets running out Message-ID: Currently one Cr target is 0.1X inch thickness and the other one is 0.01X inch thickness. We cannot use the thinner one since it occurs arcing. Replacement is necessary. From jperez at snf.stanford.edu Thu Nov 19 09:20:18 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Nov 2009 09:20:18 -0800 Subject: Comment metalica SNF 2009-11-18 02:54:58: Cr targets running out Message-ID: Thanks for the Information. I've replaced Both Cr, Ti, Au, Pt and Cu.