Problem metalica SNF 2009-11-12 00:05:25: cryo power

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Thu Nov 12 00:05:26 PST 2009


I  did one run that went fine.  Cryo temp was at 12K & gate valve closed TIGHT when I unloaded.  I put in more wafers, closed the chamber, checked the cryo (still at 12K ).  During/after roughing the chamber past 150 mt  cryo power turned off. 




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