From srikantv at snf.stanford.edu Sun Aug 8 00:41:51 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Sun, 8 Aug 2010 00:41:51 -0700 Subject: Comment metalica SNF 2010-08-08 00:41:50: Pt targets Message-ID: both are below 0.02 inch From srikantv at snf.stanford.edu Sun Aug 8 00:46:51 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Sun, 8 Aug 2010 00:46:51 -0700 Subject: Problem metalica SNF 2010-08-08 00:46:51: both Pt targets below 0.02 inch Message-ID: From jperez at snf.stanford.edu Mon Aug 9 07:07:04 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Aug 2010 07:07:04 -0700 Subject: Comment metalica SNF 2010-08-08 00:41:50: Pt targets Message-ID: Replaced Pt target. From jperez at snf.stanford.edu Mon Aug 9 07:07:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Aug 2010 07:07:27 -0700 Subject: Problem metalica SNF 2010-08-08 00:46:51: both Pt targets below 0.02 inch Message-ID: Replaced Pt targets. From dongrip at snf.stanford.edu Sun Aug 15 18:27:10 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 15 Aug 2010 18:27:10 -0700 Subject: Comment metalica SNF 2010-08-15 18:27:10: Ag target used up Message-ID: Ag target used up From ryhuang at snf.stanford.edu Tue Aug 17 12:17:51 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:17:51 -0700 Subject: Comment metalica SNF 2010-08-17 12:14:09: Au targets thin... Message-ID: 1 Au target is <.02". The 2nd target is at .036" at thinnest point. Robert From zzp at snf.stanford.edu Tue Aug 17 22:57:50 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 17 Aug 2010 22:57:50 -0700 Subject: Problem metalica SNF 2010-08-17 22:57:50: can't pump down to 150mT after finish Message-ID: the rough pump seems not working fine. From kokab at snf.stanford.edu Wed Aug 18 03:27:24 2010 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Wed, 18 Aug 2010 03:27:24 -0700 Subject: Shutdown metalica SNF 2010-08-18 03:27:24: Cryopump temp was 169K. Message-ID: From jhaydon at snf.stanford.edu Wed Aug 18 12:35:03 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Aug 2010 12:35:03 -0700 Subject: Shutdown metalica SNF 2010-08-18 03:27:24: Cryopump temp was 169K. Message-ID: cryo regend ok to use From jhaydon at snf.stanford.edu Wed Aug 18 12:35:30 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Aug 2010 12:35:30 -0700 Subject: Problem metalica SNF 2010-08-17 22:57:50: can't pump down to 150mT after finish Message-ID: had no problems pumpung to 150 mT From kyunglok at snf.stanford.edu Sat Aug 21 16:48:40 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 21 Aug 2010 16:48:40 -0700 Subject: Problem metalica SNF 2010-08-21 16:48:39: Big noise when Belljar being lowered Message-ID: Need to inspect the joint part between the belljar and supporting frame. From rostam at snf.stanford.edu Thu Aug 26 01:28:04 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Thu, 26 Aug 2010 01:28:04 -0700 Subject: Problem metalica SNF 2010-08-26 01:28:03: target A problem Message-ID: I had Ti on target A. After pressing power on, plasma blinks (turns on/off) for ~ 10 sec and then stays on. This blinking happened in my previous deposition a few days ago, too. From jperez at snf.stanford.edu Fri Aug 27 06:50:21 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Aug 2010 06:50:21 -0700 Subject: Problem metalica SNF 2010-08-26 01:28:03: target A problem Message-ID: No one has had a problem. I checked out both Ti targets and they looked good, except for thin, buat OK. I went ahead and put a new Ti target in the box. From jperez at snf.stanford.edu Fri Aug 27 06:50:56 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Aug 2010 06:50:56 -0700 Subject: Comment metalica SNF 2010-08-17 12:14:09: Au targets thin... Message-ID: Replaced Au target. From jperez at snf.stanford.edu Fri Aug 27 06:51:18 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Aug 2010 06:51:18 -0700 Subject: Comment metalica SNF 2010-08-15 18:27:10: Ag target used up Message-ID: Replaced Ag target. From gojh82 at snf.stanford.edu Sun Aug 29 09:02:07 2010 From: gojh82 at snf.stanford.edu (gojh82 at snf.stanford.edu) Date: Sun, 29 Aug 2010 09:02:07 -0700 Subject: Problem metalica SNF 2010-08-29 09:02:06: Cryo pump temp too high Message-ID: Cryo pump temp is 162K now. Cannot proceed pumping down. From jhaydon at snf.stanford.edu Mon Aug 30 08:34:20 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 30 Aug 2010 08:34:20 -0700 Subject: Shutdown metalica SNF 2010-08-30 08:34:20: cryo at 83 K down for regen Message-ID: From jhaydon at snf.stanford.edu Mon Aug 30 14:38:20 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 30 Aug 2010 14:38:20 -0700 Subject: Shutdown metalica SNF 2010-08-30 08:34:20: cryo at 83 K down for regen Message-ID: cryo regened ok to use From jhaydon at snf.stanford.edu Mon Aug 30 14:38:36 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 30 Aug 2010 14:38:36 -0700 Subject: Problem metalica SNF 2010-08-29 09:02:06: Cryo pump temp too high Message-ID: cryo regend