Problem metalica SNF 2010-07-08 17:41:41: Could not do deposition

takane at snf.stanford.edu takane at snf.stanford.edu
Thu Jul 8 17:41:42 PDT 2010


After setting everything up the "ON" button of the DC power supply doesn't respond.  Tool was enabled, HV was enabled and the target status was OK.   It's not the problem of plasma generation but the power supply didn't do anything.




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