From rostam at snf.stanford.edu Fri Jun 4 03:26:48 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 4 Jun 2010 03:26:48 -0700 Subject: Problem metalica SNF 2010-06-04 03:26:48: metalica clock is not working Message-ID: From jperez at snf.stanford.edu Fri Jun 4 07:13:14 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Jun 2010 07:13:14 -0700 Subject: Comment metalica SNF 2010-05-10 18:38:23: platen and target holders dirty Message-ID: Parts were changed on the 17th of May From jperez at snf.stanford.edu Fri Jun 4 07:13:52 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Jun 2010 07:13:52 -0700 Subject: Comment metalica SNF 2010-05-15 04:49:49: Old Au target @ .2 - .5 Message-ID: Gold was changed May 17th. From jperez at snf.stanford.edu Fri Jun 4 07:15:28 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Jun 2010 07:15:28 -0700 Subject: Problem metalica SNF 2010-06-04 03:26:48: metalica clock is not working Message-ID: There are several clocks at Metalica.. check the sides of Metalica. From ajamo at snf.stanford.edu Fri Jun 4 22:58:54 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 4 Jun 2010 22:58:54 -0700 Subject: Problem metalica SNF 2010-06-04 22:58:52: No Cryo Power Message-ID: Lost Cryo power while pumping down. Ceaser just got here so hopefullyl he can restore power & start regen. From cbaxter at snf.stanford.edu Sat Jun 5 00:22:20 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 00:22:20 -0700 Subject: Problem metalica SNF 2010-06-04 22:58:52: No Cryo Power Message-ID: Reseated signal cable on back of the on board controller. Cryo in on regen since 12am. From violetqu at snf.stanford.edu Sat Jun 5 11:20:47 2010 From: violetqu at snf.stanford.edu (violetqu at snf.stanford.edu) Date: Sat, 5 Jun 2010 11:20:47 -0700 Subject: Problem metalica SNF 2010-06-05 11:20:46: regen failed Message-ID: cryo still off From ajamo at snf.stanford.edu Sat Jun 5 16:53:04 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 5 Jun 2010 16:53:04 -0700 Subject: Comment metalica SNF 2010-06-05 16:53:03: Jim did regen Message-ID: Jim Hayden came in and started a regen on the system this morning. looks ready to use now - cryo is at 12K From rostam at snf.stanford.edu Sun Jun 6 04:27:40 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 6 Jun 2010 04:27:40 -0700 Subject: Problem metalica SNF 2010-06-06 04:27:39: cryo pump down takes much longer than usual Message-ID: pumping down to 1e-6 used to take ~45min-60min. it takes more than 75min now. From jperez at snf.stanford.edu Mon Jun 7 07:08:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jun 2010 07:08:12 -0700 Subject: Problem metalica SNF 2010-06-06 04:27:39: cryo pump down takes much longer than usual Message-ID: This have been for six months, even before the cryo pump was rebuilt. From jperez at snf.stanford.edu Mon Jun 7 07:12:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jun 2010 07:12:39 -0700 Subject: Shutdown metalica SNF 2010-06-07 07:12:39: Water will before shut off from 7 AM until 2PM today Message-ID: From jperez at snf.stanford.edu Mon Jun 7 10:00:58 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jun 2010 10:00:58 -0700 Subject: Shutdown metalica SNF 2010-06-07 07:12:39: Water will before shut off from 7 AM until 2PM today Message-ID: Water flow back up, but now down for regen. From jperez at snf.stanford.edu Mon Jun 7 10:01:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jun 2010 10:01:10 -0700 Subject: Shutdown metalica SNF 2010-06-07 10:01:10: In Regen. Message-ID: From jperez at snf.stanford.edu Tue Jun 8 07:28:04 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 8 Jun 2010 07:28:04 -0700 Subject: Shutdown metalica SNF 2010-06-07 10:01:10: In Regen. Message-ID: Regen complete. From jperez at snf.stanford.edu Tue Jun 8 07:28:25 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 8 Jun 2010 07:28:25 -0700 Subject: Comment metalica SNF 2010-06-05 16:53:03: Jim did regen Message-ID: regen complete. From jperez at snf.stanford.edu Tue Jun 8 07:28:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 8 Jun 2010 07:28:39 -0700 Subject: Problem metalica SNF 2010-06-05 11:20:46: regen failed Message-ID: Regen complete. From jperez at snf.stanford.edu Thu Jun 10 10:53:04 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 10 Jun 2010 10:53:04 -0700 Subject: Shutdown metalica SNF 2010-06-10 10:53:03: Hear roughing pump, but not pumping down chamber Message-ID: From jperez at snf.stanford.edu Thu Jun 10 10:59:30 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 10 Jun 2010 10:59:30 -0700 Subject: Shutdown metalica SNF 2010-06-10 10:53:03: Hear roughing pump, but not pumping down chamber Message-ID: Clamp came off! OK to use. From ajamo at snf.stanford.edu Sun Jun 13 08:28:25 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 13 Jun 2010 08:28:25 -0700 Subject: Comment metalica SNF 2010-06-13 08:28:24: leak? Message-ID: I used the metalica yesterday and left it rough pumped well below 150mT. When I came in this morning the needle was all the way to the left. The system did not stay pumped down overnight. From ajamo at snf.stanford.edu Sun Jun 13 08:30:11 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 13 Jun 2010 08:30:11 -0700 Subject: Comment metalica SNF 2010-06-13 08:30:11: 150um not mT Message-ID: opps, meant 150um not mT - no coffee From mattm3 at snf.stanford.edu Sun Jun 13 15:16:43 2010 From: mattm3 at snf.stanford.edu (mattm3 at snf.stanford.edu) Date: Sun, 13 Jun 2010 15:16:43 -0700 Subject: Problem metalica SNF 2010-06-13 15:16:43: Also noticed slight leak Message-ID: After roughing, I noticed that the vacuum gauge needle was slowly creeping back to higher pressure. It did not obviously effect deposition, but I don't think its going to stay at below 150 for long. From jhaydon at snf.stanford.edu Fri Jun 18 08:54:35 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 18 Jun 2010 08:54:35 -0700 Subject: Problem metalica SNF 2010-06-13 15:16:43: Also noticed slight leak Message-ID: no leak found at this time From jperez at snf.stanford.edu Fri Jun 18 09:35:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Jun 2010 09:35:31 -0700 Subject: Problem metalica SNF 2010-06-18 09:35:30: View Port coated and can not see! Message-ID: From jperez at snf.stanford.edu Fri Jun 18 09:37:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Jun 2010 09:37:39 -0700 Subject: Problem metalica SNF 2010-06-18 09:35:30: View Port coated and can not see! Message-ID: Viewport quartz has been changed. Please DO NOT strike a plasma without a wafer overhead. From ajamo at snf.stanford.edu Sat Jun 19 23:12:25 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 19 Jun 2010 23:12:25 -0700 Subject: Shutdown metalica SNF 2010-06-19 23:12:24: No Cryo Power Message-ID: I did 4 runs in a row, On the last run the power to the Cryo "No Cryo Power 2" went off. From ajamo at snf.stanford.edu Sat Jun 19 23:13:58 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 19 Jun 2010 23:13:58 -0700 Subject: Comment metalica SNF 2010-06-19 23:13:58: Au target is .02 in Message-ID: The Au target measured .06 in thick when I started and it is now at .02 in. From jhaydon at snf.stanford.edu Mon Jun 21 08:07:42 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 21 Jun 2010 08:07:42 -0700 Subject: Shutdown metalica SNF 2010-06-19 23:12:24: No Cryo Power Message-ID: cryo at 11 K From fungus at snf.stanford.edu Wed Jun 23 09:32:19 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 23 Jun 2010 09:32:19 -0700 Subject: Comment metalica SNF 2010-06-23 09:32:18: clean cathode and anode Message-ID: cathode and anode have very thick films and is flaking off the walls. Need to be cleaned. From jperez at snf.stanford.edu Thu Jun 24 08:57:59 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 24 Jun 2010 08:57:59 -0700 Subject: Problem metalica SNF 2010-06-24 08:57:58: Metalica is out of Gold targets. Message-ID: Not everyone is logging how many wafers are being deposited on the log sheet. The last Au target went in June 8th and I just measureds it and is reading >0.015 inches. An order has been placed, but has arrived yet. From jperez at snf.stanford.edu Fri Jun 25 10:14:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Jun 2010 10:14:45 -0700 Subject: Problem metalica SNF 2010-06-24 08:57:58: Metalica is out of Gold targets. Message-ID: One Au target has been placed in Metalica's box! From jperez at snf.stanford.edu Fri Jun 25 10:15:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Jun 2010 10:15:27 -0700 Subject: Comment metalica SNF 2010-06-19 23:13:58: Au target is .02 in Message-ID: Has been replaced! From jperez at snf.stanford.edu Fri Jun 25 10:17:13 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Jun 2010 10:17:13 -0700 Subject: Comment metalica SNF 2010-06-13 08:28:24: leak? Message-ID: Checked on Metalica twice and saw nio problem. Jim Haydon did check to make sure everything was tight and connected. From jperez at snf.stanford.edu Fri Jun 25 10:17:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Jun 2010 10:17:31 -0700 Subject: Comment metalica SNF 2010-06-13 08:30:11: 150um not mT Message-ID: Seems to be OK. From jperez at snf.stanford.edu Wed Jun 30 07:26:30 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 30 Jun 2010 07:26:30 -0700 Subject: Comment metalica SNF 2010-06-23 09:32:18: clean cathode and anode Message-ID: Metalica parts were changed on 6/24/10.