From ajamo at snf.stanford.edu Mon Mar 1 21:39:41 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Mon, 1 Mar 2010 21:39:41 -0800 Subject: Problem metalica SNF 2010-03-01 21:39:40: Cryo Power shut off Message-ID: System was pumping down, was almost to 1x10-6 and the Cryo power shut off. Unloaded my wafers & Eric is starting to regen. The pallet is on clean-wipes on the table. From jperez at snf.stanford.edu Tue Mar 2 07:05:38 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 2 Mar 2010 07:05:38 -0800 Subject: Problem metalica SNF 2010-03-01 21:39:40: Cryo Power shut off Message-ID: Regen Complete, thanks to Eric P. From ajamo at snf.stanford.edu Tue Mar 2 23:41:34 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Tue, 2 Mar 2010 23:41:34 -0800 Subject: Problem metalica SNF 2010-03-02 23:41:33: Lost Vacuum on last wafer Message-ID: Everything going okay until last (of 4 total) wafer. Started loosing vacuum, ion gauge shut off. Needle on torr/micron guage went slowly to the left, to ~ 150m torr. Cryo was still on & read 12K. Plasma was still going, I finished the wafer, but when last wafer was unloaded, hardly any sputtering on the wafer. first three wafers were okay. I warned the next user & asked him to leave a pass down. From ybkim at snf.stanford.edu Wed Mar 3 02:13:55 2010 From: ybkim at snf.stanford.edu (ybkim at snf.stanford.edu) Date: Wed, 3 Mar 2010 02:13:55 -0800 Subject: Comment metalica SNF 2010-03-03 02:13:55: Message-ID: From ybkim at snf.stanford.edu Wed Mar 3 02:14:01 2010 From: ybkim at snf.stanford.edu (ybkim at snf.stanford.edu) Date: Wed, 3 Mar 2010 02:14:01 -0800 Subject: Problem metalica SNF 2010-03-03 02:14:01: Message-ID: From ybkim at snf.stanford.edu Wed Mar 3 02:15:17 2010 From: ybkim at snf.stanford.edu (ybkim at snf.stanford.edu) Date: Wed, 3 Mar 2010 02:15:17 -0800 Subject: Comment metalica SNF 2010-03-03 02:15:16: it works OK Message-ID: I just finished deposition and I did not observe the pressure drop during the deposition. And the result looks good. Thanks for letting me know. From jhaydon at snf.stanford.edu Wed Mar 3 07:18:12 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Mar 2010 07:18:12 -0800 Subject: Comment metalica SNF 2010-03-03 02:13:55: Message-ID: From jhaydon at snf.stanford.edu Wed Mar 3 07:18:17 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Mar 2010 07:18:17 -0800 Subject: Problem metalica SNF 2010-03-03 02:14:01: Message-ID: From jhaydon at snf.stanford.edu Wed Mar 3 07:18:21 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Mar 2010 07:18:21 -0800 Subject: Comment metalica SNF 2010-03-03 02:15:16: it works OK Message-ID: From jperez at snf.stanford.edu Fri Mar 5 07:11:07 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Mar 2010 07:11:07 -0800 Subject: Problem metalica SNF 2010-03-02 23:41:33: Lost Vacuum on last wafer Message-ID: Regen Cryo and OK to use. One should make sure all other valves are closed. N2 valve is getting stiff and may seem closed. Argon T-inlet valve may be pointing slightly off from the close position. Not sure what caused this, but items to check. From kcbalram at snf.stanford.edu Mon Mar 15 10:43:53 2010 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Mon, 15 Mar 2010 10:43:53 -0700 Subject: Problem metalica SNF 2010-03-15 10:43:52: one of the screws for the anode of target A missing Message-ID: From jperez at snf.stanford.edu Tue Mar 16 07:33:44 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Mar 2010 07:33:44 -0700 Subject: Problem metalica SNF 2010-03-15 10:43:52: one of the screws for the anode of target A missing Message-ID: Found the screw. From dasgupta at snf.stanford.edu Tue Mar 16 14:41:18 2010 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Tue, 16 Mar 2010 14:41:18 -0700 Subject: Problem metalica SNF 2010-03-16 14:41:18: Batteries low in both flashlights Message-ID: difficult to see through window From jperez at snf.stanford.edu Thu Mar 18 07:47:29 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Mar 2010 07:47:29 -0700 Subject: Problem metalica SNF 2010-03-16 14:41:18: Batteries low in both flashlights Message-ID: Replaced batteries for 3 flashlights. From sgchong at snf.stanford.edu Sat Mar 20 01:30:14 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 20 Mar 2010 01:30:14 -0700 Subject: Problem metalica SNF 2010-03-20 01:30:13: Gate valve partly opened when roughing valve was opened Message-ID: We forgot to close the nitrogen valve when pumping down the chamber, and this led to the gate valve opening during pumping. Hope this did not cause oil contamination in the chamber.... From jhaydon at snf.stanford.edu Mon Mar 22 08:13:10 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 22 Mar 2010 08:13:10 -0700 Subject: Problem metalica SNF 2010-03-20 01:30:13: Gate valve partly opened when roughing valve was opened Message-ID: we are using an oil free pump so there should not be a problem From ajamo at snf.stanford.edu Sun Mar 28 13:15:06 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 28 Mar 2010 13:15:06 -0700 Subject: Comment metalica SNF 2010-03-28 13:15:06: Target B - okay/not okay Message-ID: Target B test is "okay" while putting target w/ silver paste and screwing down target holder , but flashes to "not okay" when placing the two collar pieces over the target holder. Flashes okay/not okay if you wiggle the collar pieces. I went back and made sure correct amount of paste was applied & target holder was firmly screwed down. Seems to happen when the next two pieces are put in place. Was able to complete work. From pnataraj at snf.stanford.edu Sun Mar 28 21:19:59 2010 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 28 Mar 2010 21:19:59 -0700 Subject: Shutdown metalica SNF 2010-03-28 21:19:58: cryo pump dead Message-ID: Cryo pump power went off during the pump down. From jperez at snf.stanford.edu Mon Mar 29 08:53:58 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 29 Mar 2010 08:53:58 -0700 Subject: Shutdown metalica SNF 2010-03-28 21:19:58: cryo pump dead Message-ID: This morning cryo pump up and running with a temperature of 12K From fungus at snf.stanford.edu Wed Mar 31 08:48:13 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 31 Mar 2010 08:48:13 -0700 Subject: Problem metalica SNF 2010-03-31 08:48:13: Cryopump hot Message-ID: Cryopump at 18K. Talked w/ Jim Haydon and got permission to see if pumpdown is still sufficient, but been instructed to shutdown upon completion so he can regen. From fungus at snf.stanford.edu Wed Mar 31 11:25:32 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 31 Mar 2010 11:25:32 -0700 Subject: Shutdown metalica SNF 2010-03-31 11:25:31: cryo needs regen 2hr Message-ID: cryo pump needs to be regen. will take about 2 hrs est.