Problem metalica SNF 2010-03-01 21:39:40: Cryo Power shut off

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Mon Mar 1 21:39:41 PST 2010


System was pumping down,  was almost to 1x10-6 and the Cryo power shut off.  Unloaded my wafers & Eric is starting to regen.  The pallet is on clean-wipes on the table.  




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