Problem metalica SNF 2010-03-02 23:41:33: Lost Vacuum on last wafer

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Mar 5 07:11:07 PST 2010


Regen Cryo and OK to use. One should make sure all other 
valves are closed. N2 valve is getting stiff and may seem closed.
Argon T-inlet valve may be pointing slightly off from the close position.
Not sure what caused this, but items to check.




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