Problem metalica SNF 2011-08-05 21:46:28: Argon level is stabilized at 15 not 30

hrleebh at snf.stanford.edu hrleebh at snf.stanford.edu
Fri Aug 5 21:46:29 PDT 2011


After 1.5 hours of pumping down, I tried to deposit Ti/Pt layers,
but Argon leven didn't go to 30. It stopped at 15. I just stop my process without any deposition.




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