Comment metalica SNF 2011-07-22 15:30:51: pressure gauge

aslani at snf.stanford.edu aslani at snf.stanford.edu
Fri Jul 22 15:30:52 PDT 2011


while deposition, the chamber pressure display would not stay on. pressed IG1 button a few times, but didn't wok. also pressure gauge would not change after opening/closing the roughing pump.




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