From jperez at snf.stanford.edu Fri Mar 11 10:51:02 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Mar 2011 10:51:02 -0800 Subject: Problem metalica SNF 2011-03-11 10:51:01: Gate Valve setting not normal to get the same pressure Message-ID: I had to turn the gate valve almost one half a turn, instead of a full turn to get 5.0X10-3 for deposition. From suyog at snf.stanford.edu Wed Mar 16 02:47:21 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Wed, 16 Mar 2011 02:47:21 -0700 Subject: Problem metalica SNF 2011-03-16 02:47:20: Roughing valve not opening. Message-ID: The knob at the roughing pump doesn't open the valve. From yoneoka at snf.stanford.edu Wed Mar 16 09:20:06 2011 From: yoneoka at snf.stanford.edu (yoneoka at snf.stanford.edu) Date: Wed, 16 Mar 2011 09:20:06 -0700 Subject: Problem metalica SNF 2011-03-16 09:20:05: Pressure gauge not working Message-ID: I did not see previous user comment and started using machine. I think the roughing pump is fine, but pressure gauge is not reading pressure. I did not proceed and returned everything to how I found them. I forgot to disable for a while. Please adjust charge as I did not end up using the machine. From jhaydon at snf.stanford.edu Wed Mar 16 14:47:57 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 16 Mar 2011 14:47:57 -0700 Subject: Problem metalica SNF 2011-03-16 09:20:05: Pressure gauge not working Message-ID: gauge is fine valve was not opening From jhaydon at snf.stanford.edu Wed Mar 16 14:48:23 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 16 Mar 2011 14:48:23 -0700 Subject: Problem metalica SNF 2011-03-16 02:47:20: Roughing valve not opening. Message-ID: replaced roughing valve From jperez at snf.stanford.edu Fri Mar 18 14:10:12 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Mar 2011 14:10:12 -0700 Subject: Problem metalica SNF 2011-03-18 14:10:11: METALICA Cryo in Regen Message-ID: Follow these steps to complete REGEN! !) Check Cryo temperature, if less then 16K, continue to step 2 2) Toggle roughing pump "DOWN" green light goes out right away Red light take about 1minute to turn off. You don't have to wait for red light. 3)Press Monitor button on Cryo "ON Board" (right below Cryo temp) display. 4) Chamber was vented for Regen, you can Use it or pump down the Chamber with roughing pump. 5) Remove RED SIGN AND NOTE. From maurice at snf.stanford.edu Mon Mar 21 11:48:39 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Mar 2011 11:48:39 -0700 Subject: Shutdown metalica SNF 2011-03-21 11:48:38: need regen Message-ID: From jhaydon at snf.stanford.edu Mon Mar 21 15:35:02 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 21 Mar 2011 15:35:02 -0700 Subject: Shutdown metalica SNF 2011-03-21 11:48:38: need regen Message-ID: regen complete, cryo compressor had shut off From jhaydon at snf.stanford.edu Mon Mar 21 15:35:26 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 21 Mar 2011 15:35:26 -0700 Subject: Problem metalica SNF 2011-03-18 14:10:11: METALICA Cryo in Regen Message-ID: regen completed From grahamab at snf.stanford.edu Tue Mar 22 18:42:41 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 22 Mar 2011 18:42:41 -0700 Subject: Shutdown metalica SNF 2011-03-22 18:42:41: roughing pump valve broken? Message-ID: I was closing the roughing pump valve and when it got near the end (bottoming out), I heard a strange noise and then the knob spun freely. I think the pin or whatever is inside broke. Regardless, the valve can't be opened. Deposition was run, but system was not vented since it can't be pumped back down. Wafer is still inside the system, Pt target is personal item, not SNF. From carterlin at snf.stanford.edu Tue Mar 22 18:48:37 2011 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Tue, 22 Mar 2011 18:48:37 -0700 Subject: Comment metalica SNF 2011-03-22 18:48:37: Roughing pump valve Message-ID: The valve seems newly installed. It gives the false impression of unable to open after closed, but after deposition, venting, and turning on the roughing, it allows user to open the valve again From jhaydon at snf.stanford.edu Wed Mar 23 08:25:40 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 23 Mar 2011 08:25:40 -0700 Subject: Shutdown metalica SNF 2011-03-22 18:42:41: roughing pump valve broken? Message-ID: The vale can not be opened untill system is vented. The handel will spin freely until then. The valve is working correctly From jperez at snf.stanford.edu Fri Mar 25 11:31:23 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Mar 2011 11:31:23 -0700 Subject: Problem metalica SNF 2011-03-25 11:31:22: Gate valve is stuff and getting harder to move Message-ID: Had gate valve almost all the way closed to get the right pressure. From zpatel at snf.stanford.edu Fri Mar 25 20:11:25 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 25 Mar 2011 20:11:25 -0700 Subject: Problem metalica SNF 2011-03-25 20:11:24: Gate valve not functional Message-ID: Gate valve was not functional after the chamber went to base pressure. Was not able to close the gate vale to bring the chamber pressure to 5E-3 torr for Al deposition. Gate valve knob keeps on rotating. From zpatel at snf.stanford.edu Fri Mar 25 20:11:50 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 25 Mar 2011 20:11:50 -0700 Subject: Shutdown metalica SNF 2011-03-25 20:11:49: Gate valve not functional Message-ID: knob keeps on rotating