Problem metalica SNF 2011-03-11 10:51:01: Gate Valve setting not normal to get the same pressure

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Mar 11 10:51:02 PST 2011


I had to turn the gate valve almost one half a turn, instead of a
full turn to get 5.0X10-3 for deposition.




More information about the metalica-pcs mailing list