Problem metalica SNF 2011-03-25 20:11:24: Gate valve not functional

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Fri Mar 25 20:11:25 PDT 2011


Gate valve was not functional after the chamber went to base pressure.
Was not able to close the gate vale to bring the chamber pressure to 5E-3 torr for Al deposition.
Gate valve knob keeps on rotating.




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