Problem metalica SNF 2011-10-22 19:51:21: base pressure difficult to reach

scrippen at snf.stanford.edu scrippen at snf.stanford.edu
Sat Oct 22 19:51:22 PDT 2011


could not reach base pressure 1e-6 even after waiting 2 hours. could only get to 1.3e-6. 5e-3 difficult to maintain with gate valve during deposition steps.




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