Problem metalica SNF 2011-09-13 21:38:40:

vossough at snf.stanford.edu vossough at snf.stanford.edu
Tue Sep 13 21:38:41 PDT 2011


I found Metallica's roughing pump switch ON (Green light) and the roughing valve partially open. the chamber was roughed down to less than 5 mtorr. I don't know how long, but suspect roughing pump oil backstreaming in the chamber.




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