From jperez at snf.stanford.edu  Thu Jul 12 07:13:52 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 12 Jul 2012 07:13:52 -0700
Subject: Problem metalica SNF 2012-06-29 17:22:44: Water dripping from RTA close to roughing pump
Message-ID: <mailman.1502.1357938533.25834.metalica-pcs@snf.stanford.edu>

Seeing no water on floor by Metalica from RTA.



From jperez at snf.stanford.edu  Fri Jul 13 08:52:05 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 13 Jul 2012 08:52:05 -0700
Subject: Problem metalica SNF 2012-07-13 08:52:04: Parts dirty inside out
Message-ID: <mailman.1503.1357938533.25834.metalica-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Fri Jul 13 08:52:35 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 13 Jul 2012 08:52:35 -0700
Subject: Problem metalica SNF 2012-07-13 08:52:04: Parts dirty inside out
Message-ID: <mailman.1504.1357938534.25834.metalica-pcs@snf.stanford.edu>

Replaced dirty parts with clean parts.



From chen0622 at snf.stanford.edu  Mon Jul 23 15:23:51 2012
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Mon, 23 Jul 2012 15:23:51 -0700
Subject: Comment metalica SNF 2012-07-23 15:23:50: could not get it pumping down to 1E10-6
Message-ID: <mailman.1505.1357938534.25834.metalica-pcs@snf.stanford.edu>

the vacuum level stayed at 4~5 E10-6 after 1.5 hr of pumping.  aborted the deposition.



From faridz at snf.stanford.edu  Mon Jul 23 15:28:28 2012
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Mon, 23 Jul 2012 15:28:28 -0700
Subject: Problem metalica SNF 2012-07-23 15:28:27: taking too long to pump down 
Message-ID: <mailman.1506.1357938534.25834.metalica-pcs@snf.stanford.edu>

previous user waited more than two hours for pumpdown. I'm going to try on my wafers until i put the tool down. 



From jperez at snf.stanford.edu  Tue Jul 24 11:03:28 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 24 Jul 2012 11:03:28 -0700
Subject: Shutdown metalica SNF 2012-07-24 11:03:27: Under Regen
Message-ID: <mailman.1507.1357938534.25834.metalica-pcs@snf.stanford.edu>

Cyro reading 11K, wiped down inside and parts, but still taking too
long to reach 1x10-6  (Only at around 3x10-6) after one hour.



From jperez at snf.stanford.edu  Tue Jul 24 13:56:18 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 24 Jul 2012 13:56:18 -0700
Subject: Shutdown metalica SNF 2012-07-24 11:03:27: Under Regen
Message-ID: <mailman.1508.1357938534.25834.metalica-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Jul 24 13:56:48 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 24 Jul 2012 13:56:48 -0700
Subject: Problem metalica SNF 2012-07-23 15:28:27: taking too long to pump down 
Message-ID: <mailman.1509.1357938534.25834.metalica-pcs@snf.stanford.edu>

Regen Cryo pump. Will test.



From jperez at snf.stanford.edu  Tue Jul 24 13:57:15 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 24 Jul 2012 13:57:15 -0700
Subject: Comment metalica SNF 2012-07-23 15:23:50: could not get it pumping down to 1E10-6
Message-ID: <mailman.1510.1357938534.25834.metalica-pcs@snf.stanford.edu>

Regen Cryo Pump.