From apal at snf.stanford.edu Sun Jun 3 16:33:39 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 3 Jun 2012 16:33:39 -0700 Subject: Comment metalica SNF 2012-06-03 16:33:39: Vaccuam Gauge Message-ID: Vaccaum gauge pressure is not dropping all the way after opoening the gate valve. From jhaydon at snf.stanford.edu Wed Jun 13 11:03:25 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Jun 2012 11:03:25 -0700 Subject: Shutdown metalica SNF 2012-06-13 11:03:25: working on lift Message-ID: From jperez at snf.stanford.edu Fri Jun 15 10:32:57 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Jun 2012 10:32:57 -0700 Subject: Shutdown metalica SNF 2012-06-13 11:03:25: working on lift Message-ID: The modified lift has been installed and is working WITHOUT screeching sounds. OK to use, No wafer tests done since it was only the lift that was worked on. From jperez at snf.stanford.edu Fri Jun 15 10:33:30 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Jun 2012 10:33:30 -0700 Subject: Comment metalica SNF 2012-03-07 08:26:12: lift is still noisy Message-ID: repaired lift is complete without noise. From jperez at snf.stanford.edu Fri Jun 15 10:35:51 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Jun 2012 10:35:51 -0700 Subject: Comment metalica SNF 2012-06-03 16:33:39: Vaccuam Gauge Message-ID: To the left of the gate valve there is a black cord, just tap on it and vacuum will drop below 10. From karthikv at snf.stanford.edu Mon Jun 25 17:03:14 2012 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Mon, 25 Jun 2012 17:03:14 -0700 Subject: Problem metalica SNF 2012-06-25 17:03:13: Arcing with Al at 100W Message-ID: I experienced arcing with an aluminum target at 100W. The base pressure was 1e-6 Torr and the process pressure was 5 mTorr. Sputtering proceeded fine with no arcing with a power of 50W. Target tester showed a green light while loading targets From jperez at snf.stanford.edu Thu Jun 28 07:00:50 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 Jun 2012 07:00:50 -0700 Subject: Problem metalica SNF 2012-06-25 17:03:13: Arcing with Al at 100W Message-ID: Removed two Alum targets and replaced with two new targets. There was suppose to have been three in the baggy. What happen to the third Al target? From kcbalram at snf.stanford.edu Fri Jun 29 17:22:44 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Fri, 29 Jun 2012 17:22:44 -0700 Subject: Problem metalica SNF 2012-06-29 17:22:44: Water dripping from RTA close to roughing pump Message-ID: