Problem metalica SNF 2012-06-25 17:03:13: Arcing with Al at 100W

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Mon Jun 25 17:03:14 PDT 2012


I experienced arcing with an aluminum target at 100W. The base pressure was 1e-6 Torr and the process pressure was 5 mTorr. Sputtering proceeded fine with no arcing with a power of 50W. Target tester showed a green light while loading targets




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