From zeyuan at snf.stanford.edu  Mon May 14 00:17:32 2012
From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu)
Date: Mon, 14 May 2012 00:17:32 -0700
Subject: Problem metalica SNF 2012-05-14 00:17:32: Al targets thin
Message-ID: <mailman.1490.1357938533.25834.metalica-pcs@snf.stanford.edu>

All the Al targets are thin, near the limit. Please replace some of them. Thanks!



From jperez at snf.stanford.edu  Mon May 14 09:28:49 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 14 May 2012 09:28:49 -0700
Subject: Problem metalica SNF 2012-05-14 00:17:32: Al targets thin
Message-ID: <mailman.1491.1357938533.25834.metalica-pcs@snf.stanford.edu>

I measured all four targets and all four are still good.
050", .070:  .060 and  .090. They have to be 0.020". or lower.



From jperez at snf.stanford.edu  Fri May 18 14:22:06 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 18 May 2012 14:22:06 -0700
Subject: Comment metalica SNF 2012-05-18 14:22:05: Still up for Low Frequency oxides
Message-ID: <mailman.1492.1357938533.25834.metalica-pcs@snf.stanford.edu>

Ran a test after 2% bottle change and dep rate was 396A/min.
Index was 1.47



From jperez at snf.stanford.edu  Fri May 18 14:23:36 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 18 May 2012 14:23:36 -0700
Subject: Comment metalica SNF 2012-05-18 14:22:05: Still up for Low Frequency oxides
Message-ID: <mailman.1493.1357938533.25834.metalica-pcs@snf.stanford.edu>

Sorry, wrote this message on wrong machine. It was for STS PECVD