sputtered film thickness?
king at snf.stanford.edu
Mon Aug 28 09:11:06 PDT 2000
For thick Cu films, first deposit a thin seed layer and then electroplate
the rest. The sputter rate is very slow in Metallica- too slow to
deposit the thickness you need.
On Fri, 25 Aug 2000, john chiaverini wrote:
> metallica users,
> i was wondering what thicknesses it is possible to sputter to in
> metallica. i'm hoping to do Cu, but i need a rather thick film. any info
> would be appreciated.
> _ _
> (_)__ / / ___ john chiaverini jac17 at leland.stanford.edu
> / / _ \/ _ \/ _ \
> __/ /\___/_//_/_//_/ america is a vast conspiracy to make you happy.
> |___/ --john updike
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