sputtered film thickness?

Robin King king at snf.stanford.edu
Mon Aug 28 09:11:06 PDT 2000


John,

For thick Cu films, first deposit a thin seed layer and then electroplate
the rest.  The sputter rate is very slow in Metallica- too slow to
deposit the thickness you need.  

Robin King

On Fri, 25 Aug 2000, john chiaverini wrote:

> 
> metallica users,
> 
> i was wondering what thicknesses it is possible to sputter to in
> metallica.  i'm hoping to do Cu, but i need a rather thick film.  any info
> would be appreciated.
> 
> thanks...
> 
> 
>       _      _
>      (_)__  / /  ___   john chiaverini       jac17 at leland.stanford.edu
>     / / _ \/ _ \/ _ \
>  __/ /\___/_//_/_//_/  america is a vast conspiracy to make you happy.
> |___/                                                    --john updike
> 
> 




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