From sjlee at snf.stanford.edu  Wed Aug  1 14:41:04 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Wed, 1 Aug 2001 14:41:04 -0700
Subject: metalica - time may be available 8/2 Thu 5AM-9AM
Message-ID: <OE41OJqXU0moav8ObGE0000693a@hotmail.com>

With these overcrowded conditions and the fact that metalica has long
runs by nature, I guess the best we can do is be diligent with updating
Coral and also keeping other users informed as much as possible.

There's a good 50% chance that I will not be able to use my 8/2 Thu 5AM
reservation...but I won't know for sure until late this evening.  So
keep an eye on Coral if you're interested, or you can ask me to send
email to you directly.

Thanks,
-John



From mahnaz at snf.stanford.edu  Wed Aug  1 16:37:08 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 01 Aug 2001 16:37:08 -0700
Subject: metalica - time may be available 8/2 Thu 5AM-9AM
References: <OE41OJqXU0moav8ObGE0000693a@hotmail.com>
Message-ID: <3B6892A4.76745792@snf.stanford.edu>

Thank you John being so diligent.

mahnaz

John Lee wrote:

> With these overcrowded conditions and the fact that metalica has long
> runs by nature, I guess the best we can do is be diligent with updating
> Coral and also keeping other users informed as much as possible.
>
> There's a good 50% chance that I will not be able to use my 8/2 Thu 5AM
> reservation...but I won't know for sure until late this evening.  So
> keep an eye on Coral if you're interested, or you can ask me to send
> email to you directly.
>
> Thanks,
> -John



From grupp at snow.stanford.edu  Thu Aug  2 11:52:39 2001
From: grupp at snow.stanford.edu (Dan Grupp)
Date: Thu, 2 Aug 2001 11:52:39 -0700 (PDT)
Subject: res. removed Fri 0800-1200
Message-ID: <Pine.SO4.4.05.10108021152160.10707-100000@snowmass>



---------------------------------------------------------------------------
Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
---------------------------------------------------------------------------



From sjlee at snf.stanford.edu  Thu Aug  2 12:13:18 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Thu, 2 Aug 2001 12:13:18 -0700
Subject: res. removed Fri 0800-1200 - taken
References: <Pine.SO4.4.05.10108021152160.10707-100000@snowmass>
Message-ID: <OE26cDjoYAPNXRPmcar0000717e@hotmail.com>

Taken...thanks.
If I get enough done, I may consequently be able to release my Saturday
afternoon reservation.   Stay tuned...
-John


----- Original Message -----
From: "Dan Grupp" <grupp at snowmass.stanford.edu>
To: <metalica at snf.stanford.edu>
Sent: Thursday, August 02, 2001 11:52 AM
Subject: res. removed Fri 0800-1200




------------------------------------------------------------------------
---
Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
------------------------------------------------------------------------
---




From sjlee at snf.stanford.edu  Thu Aug  2 14:47:14 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Thu, 02 Aug 2001 14:47:14 -0700
Subject: more shot-notice on metalica reservations
Message-ID: <3B69CA62.4B670D5B@snf.stanford.edu>

My Fri (8/3) reservation starting at 8AM depends on wbgeneral being back
in operation by late this afternoon.  To my dismay, that wetbench was
shutdown just a couple of hours ago, due to some leaky plumbing.  If it
is not back up and running, I won't be able to use my metalica slot
tomorrow morning and will modify Coral reservations accordingly.

-John


From pruitt at stanford.edu  Fri Aug  3 18:36:52 2001
From: pruitt at stanford.edu (Beth Pruitt)
Date: Fri, 3 Aug 2001 18:36:52 -0700 (PDT)
Subject: metalica free friday night
Message-ID: <Pine.GSO.4.31.0108031834130.5953-100000@elaine18.Stanford.EDU>

Won't be able to use my metallica time tonight, sorry for the late notice,
no remote coral and just found email sent earlier to metallica at snf
bounced.

Beth



From narya at Stanford.EDU  Fri Aug  3 18:41:15 2001
From: narya at Stanford.EDU (Niranjan Anand Talwalkar)
Date: Fri, 3 Aug 2001 18:41:15 -0700 (PDT)
Subject: reservation removed
Message-ID: <200108040141.f741fF500666@saga4.Stanford.EDU>

Removed metallica reservation for Sat 4pm.
-Niranjan



From tvm at SLAC.Stanford.EDU  Sun Aug  5 09:09:39 2001
From: tvm at SLAC.Stanford.EDU (Takashi Maruyama)
Date: Sun, 05 Aug 2001 09:09:39 -0700
Subject: cancelling metallica reservation
Message-ID: <3B6D6FC3.2E169193@slac.stanford.edu>

   I won't be able to use my metallica time today from 10:00am to
3:00pm.  Headway has a vacuum problem and I am not able to prepare
samples.

Takashi



From mrolandi at stanford.edu  Sun Aug  5 09:47:43 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Sun, 5 Aug 2001 09:47:43 -0700 (PDT)
Subject: sample left in metallica
Message-ID: <200108051647.f75Glhg29074@webmail.Stanford.EDU>


To Whom it may concern,

I found  a sample in Metallica that stayed there for more thn 9hrs. It was
there yesterday night at 12 30, this morning a 5 and now ( 9 30 am).
 Since it looks like somebody forgot it  and it made me miss one of my
reservations already, I decided to take it out. 
 The sample and the Pt target are next to the machine, there was a sign for
Eric signed by Sarah with some instructions under the sample. The sample is in
a sample holder with written Marco on it.

I do not know if this was the right action to do, but I really need to do
sputtering today and Metallica is very busy these days. I hope this does not
cause any damage to the sample. And if things go well I'll be happy to give to
the owner of the sample some of my time next week.

Regards
Marco




From eap at gloworm.Stanford.EDU  Sun Aug  5 22:21:09 2001
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Sun, 5 Aug 2001 22:21:09 -0700 (PDT)
Subject: Possible impending downtime
Message-ID: <200108060521.WAA06517@gloworm.Stanford.EDU>


Dear Users,

First of all, there will likely be a day of downtime coming up this 
week for a cryo regen.  There is no time available to schedule it, 
so it will likely happen when it crashes.  (Anyone willing to give up 
some time?)

On a more general (and perhaps more serious) note, the cryo cycle 
is down to about a week now, which is getting ridiculous.  This is 
perhaps an indication that we will have to take the machine down 
for extended repairs, which could take a week or more.  (cryo 
gets shipped out, etc).  

I'm hoping that we can do this after the resurrection of the innotec,
but please plan accordingly.  

Thanks,
-Eric



From eap at gloworm.Stanford.EDU  Sun Aug  5 23:17:15 2001
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Sun, 5 Aug 2001 23:17:15 -0700 (PDT)
Subject: Regen- tues nite/wed AM
Message-ID: <200108060617.XAA06618@gloworm.Stanford.EDU>


Hi Folks,

	We're looking at hopefully an overnight regen beginning Tues
night.  This should have minimal impact.  I hope metalica survives 
until then. If it crashes before then, let me know and we'll start it sooner.

-Eric




From dton at santurcorp.com  Mon Aug  6 11:47:03 2001
From: dton at santurcorp.com (Dinh Ton)
Date: Mon, 6 Aug 2001 11:47:03 -0700
Subject: Time on Metalica today (2:00 PM -> ?)
Message-ID: <902E88111EFE8F4FB273C926027F72CF02A77D@S2.santurcorp.com>



I think I have time on Metalica today from 2:00 PM on.  My wafers
are behind so I cant use the time.   I might not be able to get to CIS today
before 2 PM to cancel my time.  Please use it if you need it.

Regards,
Dinh Ton.
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From grupp at snow.stanford.edu  Mon Aug  6 16:36:40 2001
From: grupp at snow.stanford.edu (Dan Grupp)
Date: Mon, 6 Aug 2001 16:36:40 -0700 (PDT)
Subject: res. removed Mon & Tu
Message-ID: <Pine.SO4.4.05.10108061636080.28053-100000@snowmass>



---------------------------------------------------------------------------
Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
---------------------------------------------------------------------------



From mrolandi at stanford.edu  Fri Aug 10 04:55:38 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Fri, 10 Aug 2001 04:55:38 -0700 (PDT)
Subject: not using  930-12 30 fri
Message-ID: <200108101155.f7ABtcg12951@webmail.Stanford.EDU>


Sorry for the late notice
Marco




From mtang at snf.stanford.edu  Wed Aug 15 09:14:37 2001
From: mtang at snf.stanford.edu (Mary Tang)
Date: Wed, 15 Aug 2001 09:14:37 -0700
Subject: Reservation Cancelled - 8/16, 8-11 am
Message-ID: <3B7A9FED.AFC16907@snf.stanford.edu>

Hi all --

Jeannie has asked me to cancel her reservation for tomorrow morning on
Metallica.

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at snf.stanford.edu




From pruitt at stanford.edu  Wed Aug 15 13:40:15 2001
From: pruitt at stanford.edu (Beth Pruitt)
Date: Wed, 15 Aug 2001 13:40:15 -0700 (PDT)
Subject: res'n removed 6:30-9:30p
Message-ID: <Pine.GSO.4.31.0108151339540.1404-100000@epic10.Stanford.EDU>




From pruitt at stanford.edu  Thu Aug 16 18:24:50 2001
From: pruitt at stanford.edu (Beth Pruitt)
Date: Thu, 16 Aug 2001 18:24:50 -0700 (PDT)
Subject: free until midnight
Message-ID: <Pine.GSO.4.31.0108161818540.11309-100000@epic10.Stanford.EDU>

yellow light: last user reported resistance problems, I've canceled and
next user too, if you want to try a pumpdown, it is free until midnight.
good luck! Beth



From mrolandi at stanford.edu  Fri Aug 17 01:36:17 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Fri, 17 Aug 2001 01:36:17 -0700 (PDT)
Subject: stop for sample holder missing
Message-ID: <200108170836.f7H8aGg25490@webmail.Stanford.EDU>


Hi all

I just loaded the machine and I could not find the ring with the screw with
the allen head that keeps the wafer holder in place. Has anybody seen it today
or has it been missing for a while??

Marco.




From dton at santurcorp.com  Fri Aug 17 09:52:23 2001
From: dton at santurcorp.com (Dinh Ton)
Date: Fri, 17 Aug 2001 09:52:23 -0700
Subject: stop for sample holder missing
In-Reply-To: <200108170836.f7H8aGg25490@webmail.Stanford.EDU>
Message-ID: <902E88111EFE8F4FB273C926027F72CF07754F@S2.santurcorp.com>


My guess is someone (tall) put it on top of the rack near the
metalica.  Something similar happened before.  Lucky for me,
another tall person walked by and took a look there -- voila.

Also, the metalica is having a lot of water in the cold trap.  If
you happen to use the machine when the cold trap is warm, please
take a minute or two to clean this out.

Dinh


-----Original Message-----
From: Marco Rolandi [mailto:mrolandi at stanford.edu]
Sent: Friday, August 17, 2001 1:36 AM
To: metalica at snf.stanford.edu
Subject: stop for sample holder missing



Hi all

I just loaded the machine and I could not find the ring with the screw with
the allen head that keeps the wafer holder in place. Has anybody seen it
today
or has it been missing for a while??

Marco.


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From dton at santurcorp.com  Fri Aug 17 13:06:33 2001
From: dton at santurcorp.com (Dinh Ton)
Date: Fri, 17 Aug 2001 13:06:33 -0700
Subject: stop for sample holder missing
Message-ID: <902E88111EFE8F4FB273C926027F72CF077550@S2.santurcorp.com>



Okie I looked for this also but couldn't find it :-(.
Whoever used this machine last before the part is reported
missing, please go and find it.  It is your responsibility
to put things back the way they are after your are done.

Dinh

-----Original Message-----
From:	Marco Rolandi
Sent:	Fri 8/17/2001 1:36 AM
To:	metalica at snf.stanford.edu
Cc:	
Subject:	stop for sample holder missing


Hi all

I just loaded the machine and I could not find the ring with the screw
with
the allen head that keeps the wafer holder in place. Has anybody seen it
today
or has it been missing for a while??

Marco.






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From mrolandi at stanford.edu  Fri Aug 17 15:26:33 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Fri, 17 Aug 2001 15:26:33 -0700 (PDT)
Subject: tantalum
Message-ID: <Pine.GSO.4.31.0108171524190.14020-100000@epic9.Stanford.EDU>

Hi all

has anybody ever done tantalum with metallica??
Can tantalum be sputtered with metallica?? I found a target but do not
know the conditions.

Thanks
Marco.

-------------------------------------------------------------------------------
Marco Rolandi
Graduate Student Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
fax  : (650) 725-9793








From grupp at snow.stanford.edu  Tue Aug 21 03:25:09 2001
From: grupp at snow.stanford.edu (Dan Grupp)
Date: Tue, 21 Aug 2001 03:25:09 -0700 (PDT)
Subject: just finished metalica run, res rmvd Tu 1300-1500, pumping VERY slow
Message-ID: <Pine.SO4.4.05.10108210324270.6452-100000@snowmass>



---------------------------------------------------------------------------
Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
---------------------------------------------------------------------------



From mahnaz at snf.stanford.edu  Tue Aug 21 16:35:44 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Tue, 21 Aug 2001 16:35:44 -0700
Subject: reservation
Message-ID: <3B82F050.110D18A9@snf.stanford.edu>


Hello all,

Please make 4 hours reservation during prime time till we get through
this phase. I have sent out an email earlier regarding this issue, I
hate to go in there and adjust your time, please do it voluntarily.

Thanks for your cooperation.

mahnaz



From sjlee at snf.stanford.edu  Wed Aug 22 20:37:55 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Wed, 22 Aug 2001 20:37:55 -0700
Subject: may not be able to use reservation 8/23 Thu 4AM
Message-ID: <OE28ATwjaxPDh5vNpqY00002cab@hotmail.com>

There's a 50/50 chance my wafers will not be ready for the 4AM
reservation tomorrow morning.  Please email me for latest update if you
are interested in this enviable timeslot.  I'll probably be in the
cleanroom at that time anyways if you want to check in person.

-John



From mrolandi at stanford.edu  Wed Aug 22 20:56:00 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Wed, 22 Aug 2001 20:56:00 -0700 (PDT)
Subject: not using reservation tomorrow morning 8
Message-ID: <Pine.GSO.4.31.0108222055290.25362-100000@elaine26.Stanford.EDU>

sorry for the late notice

Marco

-------------------------------------------------------------------------------
Marco Rolandi
Graduate Student Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
fax  : (650) 725-9793








From sjlee at snf.stanford.edu  Thu Aug 23 03:32:26 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Thu, 23 Aug 2001 03:32:26 -0700
Subject: liquid nitrogen empty...could not use reservation 8/23 4AM
Message-ID: <3B84DBBA.9A7BD508@snf.stanford.edu>

I did not shutdown the system since the liquid nitrogen can probably be
resupplied almost instantly...just my bad luck that it can't be done at
4AM.

-John


From eap at gloworm.Stanford.EDU  Thu Aug 23 10:44:14 2001
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Thu, 23 Aug 2001 10:44:14 -0700 (PDT)
Subject: when changing targets.....
Message-ID: <200108231744.KAA04020@gloworm.Stanford.EDU>


Hi all,

	We've been asked to try not to leave our target changing 
materials on the RTA (machine next to metalica).  They are going to 
start bringing the RTA back up-  having to clean our stuff off 
before starting work just makes it more time consuming for them. 

Thanks,
-Eric (who is also guilty  :^O )


From grupp at snow.stanford.edu  Thu Aug 23 14:06:40 2001
From: grupp at snow.stanford.edu (Dan Grupp)
Date: Thu, 23 Aug 2001 14:06:40 -0700 (PDT)
Subject: machine is FREE
Message-ID: <Pine.SO4.4.05.10108231405450.9887-100000@snowmass>

eric and I are done.
-dan

---------------------------------------------------------------------------
Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
---------------------------------------------------------------------------



From tvm at SLAC.Stanford.EDU  Fri Aug 24 11:14:16 2001
From: tvm at SLAC.Stanford.EDU (Takashi Maruyama)
Date: Fri, 24 Aug 2001 11:14:16 -0700
Subject: Aug. 26 (Sun) reservation from 10:00 to 14:00 cancelled
References: <3B6D6FC3.2E169193@slac.stanford.edu>
Message-ID: <3B869978.F8B4FAB6@slac.stanford.edu>





From sjlee at snf.stanford.edu  Tue Aug 28 15:47:36 2001
From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu)
Date: Tue, 28 Aug 2001 15:47:36 -0700
Subject: metalica deposition pressure
Message-ID: <OE193WhkDp8ES092DaC00000c81@hotmail.com>

Hello,

Have any users out there run depositions at higher pressure than the
default 5 mT?  I've heard higher pressure may improve sidewall coverage
slightly.  Also heard that a practical upper setting for DC magnetron
sputtering with Ar is ~50 mT, and that the deposition rate is expected
to be slower.  I'm thinking of doing a characterization at 20 mT.  Any
advice or admonition?

Many thanks,
-John



From flannery at stanford.edu  Tue Aug 28 15:58:33 2001
From: flannery at stanford.edu (Anthony Flannery)
Date: Tue, 28 Aug 2001 15:58:33 -0700
Subject: metalica deposition pressure
References: <OE193WhkDp8ES092DaC00000c81@hotmail.com>
Message-ID: <3B8C2219.B3CA07AC@stanford.edu>

John,
I have tried doing depositions of Au and Ir at higher pressures for stress
control. At too high a pressure, too much gas is incorporated in the film
and it gets spongy. It will wipe off your wafer. What level that is depends
on the metal. 20 mT would be somewhere near the limit. I think 15 is the
highest I ever ran. I doubt something near 50 would turn out good.

I don't know about increasing pressure to improve sidewall coverage, but
sidewall coverage can be improved by lower pressure (higher incident
energy, greater secondary sputtering). I have done runs where I strike at 5
mTorr and then lower the pressure to 3 mTorr for the deposition, but you
have to watch very closely because the plasma is not very stable at that
point. It may or may not sustain.  3.5 mTorr is a safer bet, but keep your
hand near the gate valve. Your results will also differ between the guns
because I doubt they are very close in performance at this point.

Good luck. If you do any test runs, it would be great to share your
results.

Thanks,
Tony


sjlee at snf.stanford.edu wrote:

> Hello,
>
> Have any users out there run depositions at higher pressure than the
> default 5 mT?  I've heard higher pressure may improve sidewall coverage
> slightly.  Also heard that a practical upper setting for DC magnetron
> sputtering with Ar is ~50 mT, and that the deposition rate is expected
> to be slower.  I'm thinking of doing a characterization at 20 mT.  Any
> advice or admonition?
>
> Many thanks,
> -John



From mrolandi at stanford.edu  Tue Aug 28 16:04:20 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Tue, 28 Aug 2001 16:04:20 -0700 (PDT)
Subject: not using reservation today at 4 30
Message-ID: <Pine.GSO.4.31.0108281603440.26781-100000@elaine35.Stanford.EDU>


my sample is not ready
sorry for the late notice
Marco

-------------------------------------------------------------------------------
Marco Rolandi
Graduate Student Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
fax  : (650) 725-9793








From mrolandi at stanford.edu  Tue Aug 28 16:07:52 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Tue, 28 Aug 2001 16:07:52 -0700 (PDT)
Subject: sorry the reservation is at 530
In-Reply-To: <Pine.GSO.4.31.0108281603440.26781-100000@elaine35.Stanford.EDU>
Message-ID: <Pine.GSO.4.31.0108281607280.15095-100000@elaine36.Stanford.EDU>

On Tue, 28 Aug 2001, Marco Rolandi wrote:

>
> my sample is not ready
> sorry for the late notice
> Marco
>
> -------------------------------------------------------------------------------
> Marco Rolandi
> Graduate Student Department of Applied Physics
>
> Dai Group
> Department of Chemistry
> Stanford University
> Stanford, 94305
> phone: (650) 725-9156
> fax  : (650) 725-9793
>
>
>
>
>
>
>

-------------------------------------------------------------------------------
Marco Rolandi
Graduate Student Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
fax  : (650) 725-9793