From eap at gloworm.Stanford.EDU Fri Apr 18 20:04:24 2003 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 18 Apr 2003 20:04:24 -0700 (PDT) Subject: Metal dep help In-Reply-To: Message-ID: Sorry to keep propagating junkmail on labmembers email like this, but I think that an important point needs to be made: Just because someone suggests something doesn't mean you should try it without asking. Don't try reducing the pressure and increasing the power in the sputterers here. For one thing, it's not universally true that this will help. For another, you might damage the machine. -Eric > > Other options: > > 1) Going with a low pressure deposition with high power may at least > get you a decent contact for your geometry (1.8-2.0 mTorr). Keep > the power high. [...] > > > > I am having step coverage issues for my metal deposition (Al-Si) over > > contact openings 0.4um width and height.(vertical side-walls). Resulting in > > open contacts. > > > > Does anyone know of an outside source that can do some CVD type of metal > > deposition on 4inch wafers(Ex. Ti, TiW, or W)? > > > > Any suggestions on how I could resolve this problem, either with SNF > > equipment or outside vendor? > > > > I will verymuch appreciate your help/suggestions. Thanks in advance. > > From curlwang at stanford.edu Wed Apr 23 11:55:13 2003 From: curlwang at stanford.edu (Ke Wang) Date: Wed, 23 Apr 2003 11:55:13 -0700 (PDT) Subject: resv cancelled 3-8p today Message-ID: Sorry for the late notice... _____________________________________________ Ke Wang PHD Candidate Department of Applied Physics, Stanford University CISX B113-14 Stanford, CA 94305-4070 Phone: (650)723-8040 From rfasch at stanford.edu Thu Apr 24 12:29:46 2003 From: rfasch at stanford.edu (Rainer Fasching) Date: Thu, 24 Apr 2003 12:29:46 -0700 Subject: metalica free from 15:30 until 20:00 Message-ID: <001001c30a97$dd8cd680$f47640ab@stanford.edu> sorry for the late notice. -Rainer -------------- next part -------------- An HTML attachment was scrubbed... URL: From mrolandi at stanford.edu Sun Apr 27 15:24:37 2003 From: mrolandi at stanford.edu (Marco Rolandi) Date: Sun, 27 Apr 2003 15:24:37 -0700 (PDT) Subject: not using reservation 14 00- 2000 Message-ID: sunday, sorry for the late notice. Marco. ------------------------------------------------------------------------------- Marco Rolandi Graduate Student Department of Applied Physics Dai Group Department of Chemistry Stanford University Stanford, 94305 phone: (650) 725-9156 fax : (650) 725-9793