From jperez at snf.stanford.edu Mon Aug 4 15:44:17 2003 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 04 Aug 2003 15:44:17 -0700 Subject: Metalica down for Regen at 3 PM today! Message-ID: <3F2EE1C1.1E02E771@snf.stanford.edu> -- Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu From curlwang at stanford.edu Sat Aug 23 07:57:46 2003 From: curlwang at stanford.edu (Ke Wang) Date: Sat, 23 Aug 2003 07:57:46 -0700 (PDT) Subject: metalica res removed today Message-ID: _____________________________________________ Ke Wang PHD Candidate Department of Applied Physics, Stanford University CISX B113-14 Stanford, CA 94305-4070 Phone: (650)723-8040 From eap at gloworm.Stanford.EDU Tue Aug 26 17:45:38 2003 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Tue, 26 Aug 2003 17:45:38 -0700 (PDT) Subject: Don't wipe the viewport window! Message-ID: I cleaned the deposition from the metalica viewport. Unfortunately, some user has decided to "wipe" the inside clean before I got to it, so the glass is permanently scratched. If you have trouble seeing through it, thank the illiterate user who couldn't read the note right above it saying "don't wipe inside of viewport." I can't remove the scratches. If you wouldn't want someone to clean your car windshield with sandpaper then don't wipe the inside of the viewport! I'm not sure why the metal deposition was so thick. It is likely that another user, or perhaps the same (L)abuser, deposited a massive thickness or deposited without a wafer present. This causes the window to become hazy. Don't run the plasma without a wafer in the slot. Don't run swiss-cheese wafers without a backing wafer to catch the "overspray." And don't try to deposit many hundreds of nm on this machine. There are no shields that can be easily swapped as is the case with other deposition equipment, so it's a big deal when deposition goes all over the chamber. It's a THIN film system, not a highway paver. From zia at stanford.edu Wed Aug 27 16:09:01 2003 From: zia at stanford.edu (Rashid Zia) Date: Wed, 27 Aug 2003 16:09:01 -0700 Subject: reservation cancelled In-Reply-To: <3F2163B0.7060303@monano.com> Message-ID: <5.2.0.9.2.20030827160749.00bb6d80@zia.pobox.stanford.edu> Sorry for the late notice, but my samples will not be ready for tomorrow. So, the metallica system is free most of the day.