From jperez at snf.stanford.edu Fri Apr 2 16:28:40 2004 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 02 Apr 2004 16:28:40 -0800 Subject: Temp. at 18 degrees Message-ID: <406E0538.D37BC72B@snf.stanford.edu> Hi, I didn't find anyone at this time of day to start the regen on Metalica. I did send out an e-mail, hoping that someone will read it and get this done for the week-end users. You may be able to get one to two passes through before the temperature climbs any higher. -- Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu From zia at stanford.edu Fri Apr 2 21:04:51 2004 From: zia at stanford.edu (Rashid Zia) Date: Fri, 02 Apr 2004 21:04:51 -0800 Subject: metallica, free tomorrow morning Message-ID: <5.2.0.9.2.20040402210223.0254a640@zia.pobox.stanford.edu> sorry, i have to switchmy session from tomorrow morning to the afternoon because my samples are not ready yet. apologies, rashid From zia at stanford.edu Sat Apr 3 12:34:58 2004 From: zia at stanford.edu (Rashid Zia) Date: Sat, 03 Apr 2004 12:34:58 -0800 Subject: metallica free this afternoon Message-ID: <5.2.0.9.2.20040403123423.00b4c560@zia.pobox.stanford.edu> samples now broken, so metallica will be free this afternoon too. rashid From mcvittie at snf.stanford.edu Thu Apr 8 18:46:25 2004 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 08 Apr 2004 18:46:25 -0700 Subject: Request to use acrylic holder/mask in the Metalica Message-ID: <40760071.FD33D5BB@snf.stanford.edu> Metallica Users, A user has requested to use an acrylic holder/mask in the Metallica. It is normally not good vaccum procedure to put acrylic in a vaccum system. I would like to start a discussion to see how users feel about allowing this. You can reply to metalica at snf.stanford.edu. Thanks, Jim -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From sandrew at stanford.edu Thu Apr 8 18:50:29 2004 From: sandrew at stanford.edu (Scott D. Andrews) Date: Thu, 8 Apr 2004 18:50:29 -0700 (PDT) Subject: Request to use acrylic holder/mask in the Metalica In-Reply-To: <40760071.FD33D5BB@snf.stanford.edu> Message-ID: > A user has requested to use an acrylic holder/mask in the Metallica. It > is normally not good vaccum procedure to put acrylic in a vaccum system. Could you please describe in more detail why this isn't a good vacuum procedure? Many of us don't know how to evaluate this because we don't know how/why it hurts the vacuum. Does it contaminate the chamber in the long term, does it just outgas massively while it is in the chamber, etc? Thanks, Scott From mcvittie at snf.stanford.edu Thu Apr 8 19:09:14 2004 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 08 Apr 2004 19:09:14 -0700 Subject: Request to use acrylic holder/mask in the Metalica References: Message-ID: <407605CA.553CB8D@snf.stanford.edu> Scott, I have not looked at the particulars of how acrylics outgas. When I get back on Monday, I will see what I can dig up some info. In general, when you put organics ( outgassing components from plastics) in a vaccum system, they tend to stick around for a while and rise the base pressure. In addition, they can be hard on the Cryopump in that a build up in the pump will degrade its pumping and are hard to get rid of. On the other hand, we currently allow resist into this tool. One could argue that resist is essential for some users' processes and should be allowed, while there should be ways to make an metalc non-outgassing holder that does the same thing as the proposed acrylic holder. Jim "Scott D. Andrews" wrote: > > A user has requested to use an acrylic holder/mask in the Metallica. It > > is normally not good vaccum procedure to put acrylic in a vaccum system. > > Could you please describe in more detail why this isn't a good vacuum > procedure? Many of us don't know how to evaluate this because we don't > know how/why it hurts the vacuum. Does it contaminate the chamber in the > long term, does it just outgas massively while it is in the chamber, etc? > > Thanks, > Scott -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From iytchang at stanford.edu Fri Apr 9 13:01:04 2004 From: iytchang at stanford.edu (Irene Yin-Ting Chang) Date: Fri, 9 Apr 2004 13:01:04 -0700 Subject: metalica available from now-4:30pm Message-ID: <1081540864.4077010050aa7@webmail.stanford.edu> Hi, My sample is not ready. Sorry for the late notice. Irene From zia at stanford.edu Sat Apr 10 16:25:25 2004 From: zia at stanford.edu (Rashid Zia) Date: Sat, 10 Apr 2004 16:25:25 -0700 Subject: Metallica: Cryo Pump Temp at 19K Message-ID: <5.2.0.9.2.20040410162305.00b4d1c0@zia.pobox.stanford.edu> Sorry, I think I just got in the last run on Metallica for the weekend. The cryopump temperature is now at 19K. -Rashid.